Used AMAT / APPLIED MATERIALS P5000 MxP #186745 for sale
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ID: 186745
Wafer Size: 6"
Vintage: 1996
Metal etch system, 6"
(2) Metal chamber
(1) ASP chamber
1996 vintage.
AMAT / APPLIED MATERIALS P5000 MxP Reactor is an advanced physical vapor deposition (PVD) chamber designed for use in the semiconductor industry. AMAT P5000 MxP utilizes groundbreaking technology to provide superior deposition performance, maximizing wafer throughput and process control with minimal manual intervention. APPLIED MATERIALS P5000 MxP is equipped with a powerful single showerhead source, enabling the delivery of up to six separate material sources to the substrate simultaneously while continuing to provide excellent process uniformity. The chamber has an open loading chamber design, enabling the full range of substrates, shapes, and sizes to be accommodated. Additionally, the chamber incorporates a split-level lift which easily lifts substrates up to 12-inches in diameter. The advanced process control equipment of P5000 MxP ensures superior process control and uniformity. With its multi-point plasma control, the user is able to control up to eight different gas sources to maintain a precise plasma environment. Additionally, process recipe management allows for easy access, storage, or replication of up to 100 recipes. Every aspect of AMAT / APPLIED MATERIALS P5000 MxP is designed with the user in mind. For example, the auto-water flush system constantly flushes the main process chamber, collecting and removing particles and contaminants to ensure optimal performance and particle-free wafers. AMAT P5000 MxP's precise process control also allows for rapid characterization of both conductors and dielectrics, as well as precise optimization of the deposition process for improved yields. For increased safety and process performance, APPLIED MATERIALS P5000 MxP incorporates an advanced edge leakage detection unit. This machine detects and displays plasma leakage from the chamber edge providing an increased safety margin. In conclusion, P5000 MxP offers an unparalleled combination of performance and process control backed by a robust and reliable design. By combining its advanced showerhead source and rapid recipe management, AMAT / APPLIED MATERIALS P5000 MxP delivers superb speed and process uniformity for the highest quality wafers.
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