Used AMAT / APPLIED MATERIALS P5000 MxP #293607187 for sale

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ID: 293607187
Vintage: 1996
Oxide etcher (3) MxP Chambers 1996 vintage.
AMAT / APPLIED MATERIALS P5000 MxP is an advanced reactor designed for high throughput materials processing applications. AMAT P5000 MxP reactor is capable of performing multiple simultaneous processes, including etching, deposition and rapid thermal processing. This reactor can be used to create multi-layer semiconductor devices, or to replace existing less efficient manufacturing processes. APPLIED MATERIALS P5000 MxP is an all metal, metal seal, single-wafer processing chamber. It features an advanced conformal shield equipment and is designed to handle large substrate size handling. The modular setup makes it easy to integrate P5000 MxP within existing manufacturing line infrastructure. AMAT / APPLIED MATERIALS P5000 MxP reactor provides a uniform process chamber temperature and distribution even when large substrates sizes are used. Additionally, AMAT P5000 MxP features a fully automated hot-wall temperature control system to further improve temperature uniformity in the process chamber. APPLIED MATERIALS P5000 MxP offers several advanced process control capabilities. This includes real-time process monitoring and data logging, with automated reporting and document management systems. This ensures efficient process repeatability and reduces reliance of manual processes. P5000 MxP also includes an advanced multi-nozzle electron-beam source delivery unit. This provides pre-programmable, automated control of the capacitively coupled plasma source without operator intervention. This machine accurately controls plasma source power and allows high throughput, high-yield fabrication. The automated wafer handling and RobotArm tool exchange tool allow multiple substrates to be loaded into AMAT / APPLIED MATERIALS P5000 MxP reactor at once and exchanged during processing runs. This reduces process time and therefore cost of product creation. Additionally, it allows uniformity of product output and a faster turnaround time for product creation. Overall, AMAT P5000 MxP reactor is a single-wafer processing chamber featuring advanced shielding, process control capabilities and automated wafer handling. This reactor is capable of high-throughput, large-scale fabrication and is designed to be integrated within an existing manufacturing line.
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