Used AMAT / APPLIED MATERIALS P5000 MxP+ #293615042 for sale
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ID: 293615042
Poly etcher
(2) MxP Chambers
ESC Chuck
Endpoint
Gate valve
Throttle valve
EDWARDS C301 Turbo pump
AMAT-0 Heat exchanger
OEM-12B RF Generator.
AMAT / APPLIED MATERIALS P5000 MxP+ is a multi-chamber reactor system that utilizes a pulsed continuous loadlock (PCL), a Flash Lamp Anneal (FLA), and a 3D scanning process to fabricate advanced electronic devices. It also provides easy access to processing parameters and supports multiple parallel process steps. AMAT P5000 MxP+ has a 42 cm x 24 cm PCL that allows for rapid substrate loading and unloading for both high temperature and ultraclean processes. It utilizes a built-in load port and on-board micro-controllers for precise process control, allowing for tight control of oxygen and moisture during substrate handling. The Flash Lamp Anneal (FLA) uses an ultra-short pulse of light energy to deliver high energy annealing without the need to externally heat the substrate. This process allows tight tolerance of critical process parameters such as temperature, annealing time and energy spread to be achieved while maintaining good self-aligned control. The 3D scanning process provides a high-resolution two-dimensional imaging of the substrate surface. It is capable of accurate 3D surface mapping using a near-infrared camera which helps to quickly identify defects, analyze contours, and measure features. This allows for more efficient process development and substrate characterization. APPLIED MATERIALS P5000 MxP+ is equipped with software that supports electronic recipe transfer, furnace control, chamber monitoring, production tracking, and data logging. This allows for process automation and real-time control of the critical process parameters. Additionally, the digital touch-screen system provides easy access to process parameters with single step operations. This ensures fast, accurate, and precise processing. P5000 MxP+ is an advanced multi-chamber reactor system designed to provide precise control in advanced device fabrication. With its Flash Lamp Anneal technology, 3D scanning process and user-friendly software, it is suitable for use in both research and industrial settings.
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