Used AMAT / APPLIED MATERIALS P5000 MxP #9017018 for sale
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ID: 9017018
Cluster tool, 8"
(2) Chambers
(8) Storage units
General Information:
Cass nest: Plastic 8"
Wafer shape: SNNF (Semi notch no flat)
No SMIF Interface
System Information:
Software version: B4.70
Has SECS / GEM
Chamber Location / Type / Current Process:
Position A: MxP / Oxide etch
Position B: MxP / Oxide etch
Etch chamber:
Chamber type: MxP
Wafer clamp: Polyimide ESC
Has BS He Cooling
Has He dump line
Turbo pump: SEIKO STP-301CVB
Endpoint type: Stand alone
Monochrometer qty: Each per chamber
Generator model: ENI OEM-12B3
Max Power: 1250 w
Lid temp control: PID control
Gate valve: Heated gate valve
Matcher: SMA-1000
Process Manometer: MKS 1 Torr
Gas Panel:
Manual valve: On each line
Filter: On each line
Gas panel facilities hook up: Multi-line top feed
Exhaust: Top
Has gas panel door interlock
Has gas panel exhaust interlock
Gas Panel Pallet:
(5) Insert gas lines per chamber
MFC Type: STEC SEC-44000 MC / STEC SEC-Z512MGX
Chamber A:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-4400
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Chamber B:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-7440M
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Mainframe:
Loadlock type: 8-slot
Has cassette present sensor
Robot type: DRIVE, ROBOT P 5000 WKIT
EMO Button: Front, side
Has water leak detector
Signal tower (front): Green, yellow, red
Remotes:
Line frequency and voltage: 50 / 60 Hz, 3 Ph, 208 VAC
Remote UPS interface: 1 Ph, 120 V
System monitor display / conntroller: In front
Has EMO button
Has smoke detector
Has water leak detector
Heat Exchanger type:
For wall: AMAT-0 x1
For cathode: NESLABE HX-150 x1
Pumps Type:
LL Chamber: EBARA A10S (not included in scope)
Chamber A: EBARA A30W (not included in scope)
Chamber B: EBARA A30W (not included in scope)
1992 vintage.
AMAT / APPLIED MATERIALS P5000 MxP is a reactor designed for start to finish semiconductor device fabrication. The tool is an epitaxial deposition tool that is highly versatile, allowing for the deposition of thin-films at high substrate temperatures. The tool is capable of deposition using multiple sources with proprietary multi-zone technology that improves uniformity creating better wafer yields. The state of the art source technology reduces fluctuations in power and temperature ensuring better film quality and repeatability. The tool's superior flexibility allows users to deposit over a wide range of materials, including oxides, nitrides, metals and combinations of them. Additionally, the tool allows for a range of film thickness, from sub-monolayer to several hundred nanometers. The ability to manipulate parameters such as temperature, pressure flow and power, enable users to tailor-make their deposition process. AMAT P5000 MxP is equipped with a proprietary ultra-high vacuum equipment that reduces particles and contaminants in the system and increases productivity. The advanced line-of-sight deposition process provides better quality than conventional deposition systems by creating a completely sealed chamber and reacting to lasers inside it. This helps to improve control, stability and repeatability. The tool also features advanced process control software allowing users to optimize their processes for speed and efficiency. APPLIED MATERIALS P5000 MxP also features robust unit monitoring and diagnostics, helping to increase reliability and predict performance. With advanced monitoring features, the tool can detect problems that may arise from deposition parameters, atmospheric pressure or any other abnormal conditions, allowing operators to address them quickly. Overall, P5000 MxP is a reliable, high-performance deposition tool that allows users to meet the stringent requirements of semiconductor device fabrication. This tool offers superior flexibility, improved quality and reliability, increased yield, and advanced process control. With its advanced multi-zone technology and ultra-high vacuum machine, AMAT / APPLIED MATERIALS P5000 MxP is the perfect choice for semiconductor device manufacturing.
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