Used AMAT / APPLIED MATERIALS P5000 MxP #9037735 for sale
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ID: 9037735
Vintage: 1992
Cluster tool with 2-chamber, 8"
General Information:
Cass nest: Plastic 8"
Wafer shape: SNNF (Semi notch no flat)
No SMIF Interface
System Information:
Software version: B4.70
Has SECS / GEM
Chamber Location / Type / Current Process:
Position A: MxP / Oxide etch
Position B: MxP / Oxide etch
Etch chamber:
Chamber type: MxP
Wafer clamp: Polyimide ESC
Has BS He Cooling
Has He dump line
Turbo pump: SEIKO STP-301CVB
Endpoint type: Stand alone
Monochrometer qty: Each per chamber
Generator model: ENI OEM-12B3
Max Power: 1250 w
Lid temp control: PID control
Gate valve: Heated gate valve
Matcher: SMA-1000
Process Manometer: MKS 1 Torr
Gas Panel:
Manual valve: On each line
Filter: On each line
Gas panel facilities hook up: Multi-line top feed
Exhaust: Top
Has gas panel door interlock
Has gas panel exhaust interlock
Gas Panel Pallet:
(5) Insert gas lines per chamber
MFC Type: STEC SEC-44000 MC / STEC SEC-Z512MGX
Chamber A:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-4400
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Chamber B:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-7440M
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Mainframe:
Loadlock type: 8-slot
Has cassette present sensor
Robot type: DRIVE, ROBOT P 5000 WKIT
EMO Button: Front, side
Has water leak detector
Signal tower (front): Green, yellow, red
Remotes:
Line frequency and voltage: 50 / 60 Hz, 3 Ph, 208 VAC
Remote UPS interface: 1 Ph, 120 V
System monitor display / conntroller: In front
Has EMO button
Has smoke detector
Has water leak detector
Heat Exchanger type:
For wall: AMAT-0 x1
For cathode: NESLABE HX-150 x1
Pumps Type:
LL Chamber: EBARA A10S (not included in scope)
Chamber A: EBARA A30W (not included in scope)
Chamber B: EBARA A30W (not included in scope)
1992 vintage.
AMAT / APPLIED MATERIALS P5000 MxP is a semiconductor fabrication reactor designed for a wide range of processes. It is a highly advanced, high throughput tool designed to maximize throughput and minimize downtime. AMAT P5000 MxP's modular design and automation flexibility facilitates rapid process development and process optimization, allowing for shorter production cycles with higher yields. APPLIED MATERIALS P5000 MxP features a precisely controlled pressure and temperature chamber, an optimized plasma source, and automated process monitoring and fault detection systems. The pressure chamber has been precisely engineered to ensure consistent process results by maintaining stable temperature, pressure, and oxygen levels. A specialized high-power frequency-agile plasma source is also included, providing precise control over the process flow. P5000 MxP's automated process monitoring and fault detection system allows users to adjust their process parameters in real-time and get up-to-date information on the status of their process. This allows users to quickly identify potential problems and take corrective action before they cause significant delays in their production process. AMAT / APPLIED MATERIALS P5000 MxP is supported by an easy-to-use software suite with a variety of features for managing and monitoring process conditions as well as creating visualizations. The software suite supports data analysis and reporting as well as recipe creation, real-time process monitoring, and automatic fault-detection. Additionally, the automated system enables users to efficiently manage their production process and quickly adjust parameters to meet process objectives. AMAT P5000 MxP is a highly advanced, high performance, and highly flexible reactor system designed for a wide range of processes. The precision engineering and automated process management features of APPLIED MATERIALS P5000 MxP enable users to develop and optimize their processes quickly, maximize their throughput, and reduce their downtime. With the help of highly advanced systems and software, P5000 MxP is the perfect choice for reliable and efficient semiconductor fabrication processes.
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