Used AMAT / APPLIED MATERIALS P5000 #101854 for sale
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ID: 101854
Wafer Size: 6"
Etch systems, 6"
(Qty 3) ILD depostion and (Qty 1) W deposition
There are 4 chambers in each tool
Vacuum packaged and wooden crated since 2002
1992-1995 vintage.
AMAT / APPLIED MATERIALS P5000 is a semiconductor processing tool used in the semiconductor industry to create integrated circuits. AMAT P-5000 is a thermal oxidation reactor with a four-zone method, allowing for uniform and consistent processing. This equipment uses a quartz tube as the reaction chamber that can reach up to 1500°C. The controls allow for fine tuning of temperature, pressure, and other parameters to produce an oxidized surface with accurate precision. The system is comprised of four zones, including Preheat, Oxidation, Cool-down, and Wafer Clean-up. The Preheat zone is composed of two heaters that are used to raise the temperature of the wafer. The temperature is monitored with thermocouples and managed with a temperature controller to ensure that the temperature is accurate. The Oxidation zone uses a reaction chamber to perform the oxidation process. The chamber uses a combination of a quartz tube, a two-stage diffusion pump, a forced flow of oxidants and/or reducing agent, and a microwave plasma source. This combination produces an oxidized surface with accurate precision. The Cool-down zone is used to reduce the temperature of the wafer back to a safe level. This is done through the use of an gas purge unit and heat sinks located in the chamber. The Wafer Clean-up zone is used to clean and polish the wafer's oxidized surface. This is done with a hot plate and a chemical clean-up process. APPLIED MATERIALS P 5000 machine is highly customizable, and offers many features such as: dual zone temperature control, microwaves for tailoring the material deposition, and various other amenities for increased productivity. This tool is ideal for use in advanced semiconductor research and production. APPLIED MATERIALS P-5000 is capable of producing highly precise, uniform, and repeatable results and is an essential tool for the semiconductor industry.
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