Used AMAT / APPLIED MATERIALS P5000 #152721 for sale

AMAT / APPLIED MATERIALS P5000 is a fully automated reactor equipment designed for high-productivity semiconductor device manufacturing. It is capable of depositing, etching, and cleaning all materials necessary in the production of integrated circuits. The system combines advanced process control, advanced substrate handling and monitoring capabilities. AMAT P-5000 utilizes a modular architecture comprised of a deposition source, loadlock, central process chamber, and a maintenance chamber. The deposition source contains the chemical source, turbomolecular pump and sublimation heater, while the central process chamber has a vacuum pump, gas distribution systems, and other components required for deposition and etching processes. For making chemical-mechanical planarizations, APPLIED MATERIALS P 5000 includes a CMP station with a chemical delivery unit and a set of rotating pads. The loadlock has two doors for transferring substrates from an external environment and has been designed to minimize particle introduction. This machine is capable of handling substrates between four and twelve inches in diameter. The tool includes a strong suite of process capabilities to fabricate semiconductor devices. Dielectric deposition on silicon, titanium and tungsten is supported by high-rate ion-assisted deposition technologies. Etching of metals and dielectric layers is enabled by magnetron sputter etching, inductively-coupled plasma etching, and physical sputtering. APPLIED MATERIALS P-5000 also supports thermal processes such as diffusion, annealing, and soldering. The asset was developed with an emphasis on high productivity and repeatability, making it ideal for large-scale production jobs. It achieves these objectives by integrating sophisticated process control algorithms, easy-to-use user interface, automated troubleshooting, and traceability. Additionally, P 5000 can be easily integrated with many existing factory automation systems, making it a viable solution in mass production environments. APPLIED MATERIALS P5000's wide range of process capabilities, ease-of-use, high throughput and its ability to be integrated into many existing production facilities makes it a valuable tool for device fabrication. It provides for rapid and efficient production of high-quality semiconductor devices.