Used AMAT / APPLIED MATERIALS P5000 #188664 for sale
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ID: 188664
Wafer Size: 6"
SACVD system, 6"
(2) Chambers (configured for 3)
Storage elevator with (15) slots
PLIS
TEOS only
(2) OEM 12B power supplies.
AMAT / APPLIED MATERIALS P5000 is a high productivity metal etcher reactor designed to offer precise and precise control of material etching processes. This state-of-the-art machine is an advanced etching tool specifically designed to be durable and provides an economical solution for high-throughput etching requirements. It is widely used in manufacturing processes such as aerospace, automotive, semiconductor, thin film, electronics and medical device applications. AMAT P-5000 offers rapid processing capability up to 300 wafers per hour. Utilizing proprietary AMAT technology, APPLIED MATERIALS P 5000 features uniform etching and very low etch rate variation in a range of process modules. The unique etching characteristics of AMAT P5000 provide very homogenous etching results with little particle contamination or film delamination. The process includes a unique gas injection equipment that produces uniform etching results in both front side and back side etching applications. AMAT / APPLIED MATERIALS P-5000 provides a wide range of process options. APPLIED MATERIALS P5000 features a two-stage rotating wafer carrier system. This enables simultaneous processing of two wafers, allowing for quicker plasma processing in multiple locations. Additionally, P-5000 supports process times of up to 400 seconds per wafer, allowing for intricate etching processes such as via hole elongation. AMAT P 5000 also has a high precision plasma delivery unit that provides precise control of reactive ion etching and chemical etching. This machine consists of a patented plasma source and patented advanced etching device with fluidic control of the wafer position. This, combined with a precise synchronization of both the et chimney and the process gas injectors, allows for precise etching rates and uniform etch depths. APPLIED MATERIALS P-5000 is designed to reduce cost and increase throughput with customizable modules. A selection of optional modules, including gas injection ring module, reactive ion etching module, wet etch module and energy harvesting module, are available to provide process flexibility and to reduce downtime. The tool also features a number of safety and protection features, such as an integrated embrittlement asset, an advanced chemical etch tracking model and a crash heating equipment. AMAT / APPLIED MATERIALS P 5000 is a highly advanced, reliable and cost-effective etching tool. It provides efficient and uniform etching results, high processing speeds and a wide range of process options for a variety of manufacturing processes. With its customizable modules, P 5000 can be configured to meet the most demanding production requirements.
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