Used AMAT / APPLIED MATERIALS P5000 #293603569 for sale
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AMAT / APPLIED MATERIALS P5000 is an in-situ plasma processing equipment for semiconductor fabrication, offering a platform for a variety of different plasma-based materials processing functions. The system includes a variety of unique features, including an all-metal vacuum chamber, a heated substrate holder, and an automated wafer transport unit. AMAT P-5000 operates at a wide range of process parameters, allowing for precise control over the material surface affect. It is capable of working with a variety of gases, such as oxygen, argon, and nitrogen. The machine's plasma source is a microwave-driven 2.45 GHz magnetron, controlled by a multi-level RF power supply. It has been designed to support the high-density plasma process, giving it the ability to perform a variety of tasks, such as depositing thin films, etching surfaces, and carbonizing substrates. APPLIED MATERIALS P 5000's vacuum chamber is built with an all-metal body to ensure optimum thermal uniformity and an alloy that is resistant to plasma erosion. The chamber also features a dual vacuum valve tool to provide full evacuation at low process pressures and a gasketless window to allow viewing of substrate processing. The simplified load-lock chamber is equipped with a one-touch loading and unloading feature, making it easy to transfer samples from the cleanroom to AMAT / APPLIED MATERIALS P-5000. AMAT P 5000 is able to maintain temperatures up to 350°C and a maximum pressure of 450 torr. It comes equipped with a high-performance substrate holder that enables the precise and uniform heating of the sample surface to within +/- 3°C. A range of susceptors and lifted substrates are compatible with the substrate holder to enable the processing of a variety of sample sizes and shapes. The wafer transport asset is designed to be ergonomic and user-friendly, with automated program codes controlling each stage of the process flow. AMAT P5000 is also equipped with an advanced control model, allowing users to accurately control the parameters of their process. This includes the ability to track and monitor the temperature, pressure, and gas flows of the process, as well as set alarm limits and log process parameters. This makes APPLIED MATERIALS P-5000 a powerful tool for the optimization of processes and the production of repeatable and consistent results.
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