Used AMAT / APPLIED MATERIALS P5000 #293729490 for sale

AMAT / APPLIED MATERIALS P5000
ID: 293729490
Wafer Size: 6"
CVD System, 6" Process: SiN.
AMAT / APPLIED MATERIALS P5000 is a commercial-grade reactor designed to perform advanced material synthesis, deposition and etching processes. It is a dual source inductively coupled plasma (ICP) reactor that can process multiple wafers in parallel, making it ideal for production of high-volume substrates. The ICP source used in AMAT P-5000 can operate at either 13.56MHz or 27.12MHz, allowing for full compatibility with a wide range of materials, processes, and applications. It also includes full-spectrum in situ monitoring capabilities to monitor process performance. The ICP source can reach temperatures as high as 1000C, permitting a variety of high-temperature processes. APPLIED MATERIALS P 5000 is designed to optimize process control, offering both a direct process control (DPC) regime and a feedback regime. The DPC mode allows for adjustable gas flow, pressure, geometry, and environmental conditions for excellent process controllability. The feedback mode also enables quick adaptation of the equipment to changing process conditions, allowing for fast and accurate optimization of process parameters. In addition, AMAT / APPLIED MATERIALS P 5000 utilizes an advanced automated wafer transfer system to handle up to twenty-four wafers in parallel, allowing for high throughput. The load lock design is perfect for efficient material loading and unloading, while the localized in situ monitoring unit monitors deposition and etching process conditions in real-time, giving operators more control over the processes. P-5000 also offers an advanced clean chamber design and excellent chemical management capabilities, with an automated machine that precisely regulates chemical flow and measurements. This assures a reliable and stable process window of operation. These features make APPLIED MATERIALS P-5000 a great choice for high-volume production environments, offering superior process yields and superior process performance.
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