Used AMAT / APPLIED MATERIALS P5000 #293758508 for sale
URL successfully copied!
Tap to zoom
ID: 293758508
Wafer Size: 8"
Metal etcher, 8"
(3) ALCATEL Dry pumps
(2) MxP Chambers
ASP Chamber
Main process modules:
Chamber A
Metal etch B
Strip D
Expanded VME
Phase III Robot
Phase II Cassette
Mark II Main frame
(29) Slot Storage Elevator
Independent helium cooling
Sub modules:
AC Remote frame
Digital cables
Analog cables
ASTEX Microwave
Heat exchanger AMAT
ENI 12A RF generators
ENI 12B RF generators
Emergency interlock cables.
AMAT / APPLIED MATERIALS P5000 is a high-performance etch reactor designed for the semiconductor industry. The equipment is capable of providing the critical process steps required for device fabrication, including etching, deposition, and planarization. It is optimized for producing ultra-shallow structures, critical for advanced nodes and next-generation devices. AMAT P-5000 reactor platform utilizes digital scan optics to provide high resolution uniformity and optimized wafer throughputs throughout the entire process chamber. It is comprised of a proprietary vacuum chamber with integrated gas modules, process chamber components, and digital scan optics. These components are designed to ensure the highest possible performance and reliability. APPLIED MATERIALS P 5000 etch reactor is capable of providing a wide range of etch processes, including silicon etch, tungsten etch, and other advanced materials. The system uses a variety of etch chemistries to provide high selectivity and process uniformity. The unit also incorporates plasma-enhanced etch processes for increased removal rates and better uniformity. AMAT P5000 reactor features advanced automation and diagnostics to ensure high process yields. It is integrated with a real-time chamber tuning module that monitors plasma parameters and actively adjusts for optimum process performance. It also features a high-resolution processing monitor to capture and process data from the full range of parameters and sequences. P5000 reactor is highly configurable and capable of adjusting to virtually any process requirement. Its software-based environment allows engineers to quickly adjust parameters and programs to process a wide range of materials. The machine is capable of full redundancy and hot-swap capability, ensuring continuous operation and reduced downtime. P-5000 Etch Reactor is designed to meet the most stringent requirements and is the ideal choice for any application requiring high-performance etch processing. Its reliable design and advanced automation ensures high yields and uniformity, making it the perfect solution for any semiconductor application.
There are no reviews yet