Used AMAT / APPLIED MATERIALS P5000 #293823309 for sale
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AMAT / APPLIED MATERIALS P5000 is a type of multi-magnetron RF parallel-plate capacitively coupled plasma (CCP) reactor designed and manufactured by AMAT, Inc. This highly advanced reactor is designed for use in a variety of high-density plasma (HDP) process technologies like etching, deposition, and semiconductor device fabrication. Commonly used in research and commercial applications, the reactor is capable of high-throughput, precise and repeatable processing of a wide range of material types. This allows for cost savings over traditional methods and ensures consistency of results. AMAT P-5000 reactor is a three chamber equipment with an RF power module, main chamber, and pump. The RF power module contains the main RF generator, a matching network, an optimized impedance tuner, and other electrical equipment. The matching network, which matches signals from the antenna to the transmitter, safeguards and optimizes the output from the RF generator. This element is of particular importance, as it ensures a consistent, predictable RF power. The optimized impedance tuner includes an auto-tuner function that can be used for on-the-fly tuning and is used to provide maximum power delivery to the antenna during processing. The main chamber of APPLIED MATERIALS P 5000 reactor houses the solid state antenna assembly. This assembly is made up of three coils, mounted on three separate stanchions, and is designed to propagate plasma in the chamber while covering the entire surface area. Through precision placement of the coils and use of parallel plates, the antenna creates high density plasma with very thin, even plumes. The antenna field strength is adjustable to increase or decrease the plasma intensity, allowing for processes like deposition, etching, and bonding to be performed with greater control. The main chamber is also home to the gas delivery system, which can inject and mix multiple gas species into the chamber. This gas delivery unit is designed to create a homogenous and stable environment in which plasma processing can take place. Additionally, the main chamber of APPLIED MATERIALS P-5000 houses various aerospace-grade materials and insulation, ensuring high quality construction and durability. The pump machine of AMAT / APPLIED MATERIALS P 5000 reactor is responsible for removing particles and gases from the chamber after the process has completed. The pump tool is one of the most important components of the reactor, as without a proper gas and particle pump there would be limited repeatability and significant plasma losses. The pump asset is highly advanced and includes an adjustable pump rate and speed control for particles, as well as multiple gas control valves for different pump speeds. P 5000 reactor is a highly advanced processing model, built with experimentation and production processes in mind. With its powerful RF power module and optimized impedance tuner, multi-magnetron antenna, and highly efficient gas and particle pump equipment, APPLIED MATERIALS P5000 is capable of producing consistent, high quality results at a fraction of the cost of traditional methods. Furthermore, the reactors can be easily customized for specific processes, making them an optimal choice for use in many research and commercial applications.
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