Used AMAT / APPLIED MATERIALS P5000 #9144772 for sale
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AMAT / APPLIED MATERIALS P5000 is a high-throughput, parallel reactor designed for MOCVD (Metal-Organic Chemical Vapor Deposition) applications. The reactor utilizes a modular design that offers superior scalability and process flexibility in strategic field-of-view (FOV) and chamber cavity configurations. The equipment is designed to provide high throughput with applications for metrology, lithography, material science and MicroElectroMechanical Systems (MEMS) device processing. The process chamber of AMAT P-5000 is equipped with a mass flow controller (MFC) that controls the delivery of inert gas and process gases, while the substrate temperature is regulated by a thermally efficient substrate holder. The MFC is coupled with a digital controller and temperature measurement system that offers precise control of the process environment. The unit also includes an advanced wafer-to-refinery interface that minimizes potential contamination and increases process window reproducibility. In addition to the process chamber, APPLIED MATERIALS P 5000 also includes an in-situ metrology machine which offers reliable real-time monitoring of process status and accuracy. Using high-quality optical instruments, the metrology tool can capture surface images of the sample and analyze a variety of data including crystal growth rate and uniformity. This ensures reliable high-throughput production with low risks of contamination or other anomalies. P-5000 boasts a transport asset that is engineered for robustness and flexibility, minimizing process down-time and avoiding crashed wafers. This transport model offers tight control of rotor speed and wafer centering, as well as a fail-safe equipment for automatic fault detection. The overall design of P5000 system is optimized for a maximum throughput and superior flexibility. With its superior scalability, process versatility, and tight process control capabilities, AMAT / APPLIED MATERIALS P-5000 is sure to meet the requirements of MOCVD applications in the semiconductor and related industries.
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