Used AMAT / APPLIED MATERIALS P5000 #9196361 for sale
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ID: 9196361
Wafer Size: 8"
PECVD System, 8"
Wafer sense
Robot
Storage elevator
Ergo cassette loaders
Electrical / Pump rack
UNIT INSTRUMENTS, 1660
RF Matching network
RIF Rack
(2) EDOCS With rack
Mini controller
Monitor rack
Heat exchanger
Tool cables
Lamp modules
Nitride PARC
(4) Chambers
Missing parts:
Process kits
OEM Mouse
Process:
USG
SiN.
AMAT / APPLIED MATERIALS P5000 is a high-performance semiconductor processing reactor that can perform a variety of tasks. It is primarily used in production processes such as lithography, etching, epitaxy, and implantation. AMAT P-5000 features a large 225 mm chamber that is capable of accommodating a variety of substrate shapes. It has an in-situ adapter plate for easy setup as well as a horizontally mounted exhaust hood for better thermal management. APPLIED MATERIALS P 5000 is equipped with two independent source slots that can be configured to provide both Step & Repeat (S&R) and Continuous Scan (CS) delivery of process gases. This allows increased throughput while delivering consistent results. In addition, AMAT P 5000 includes a proprietary Endura Gas Management Equipment, which allows the user to precisely control gas flow to the process chamber. The Endura Gas Management System also features an automated purging process that helps reduce downtime and minimize waste. P5000 is also equipped with a full range of temperature control capabilities. It features a high accuracy temperature regulation unit that maintains temperature in the chamber to within +/− 0.5 °C. AMAT / APPLIED MATERIALS P 5000 also includes a Zone Action Control (ZAC) machine that provides verification of uniformity over the entire substrate. In addition, AMAT P5000 can be paired with either the Endura Standard or Advanced Gas Management Tool, allowing users to take advantage of an unlimited number of recipes and automated gas mixing. Due to its high performance and accuracy, APPLIED MATERIALS P5000 is ideal for production processes where industry-leading yield, repeatability, and cycle time are desired. It is also capable of handling a wide range of voltage and power requirements and can accommodate wafers up to 11" in diameter. Additionally, AMAT / APPLIED MATERIALS P-5000 has been designed for rapid setup, allowing users to get up and running quickly. With its superior performance and robust design, P-5000 is the perfect solution for any semiconductor production environment.
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