Used AMAT / APPLIED MATERIALS P5000 #9203417 for sale

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ID: 9203417
CVD System Parts machine.
AMAT / APPLIED MATERIALS P5000 reactor is a multi-purpose, production-scale etcher and deposition tool. It is an advanced vacuum processing system ideal for creating state-of-the-art thin-film components and devices. AMAT P-5000 is constructed with a tubular-shaped, single-walled stainless steel chamber, providing robust reliability and ease of installation. It stands at 156.5 cm in height and is located inside a double-walled stainless steel enclosure with a 20-inch closing diameter and a pressure capability of up to 6 torr. The chamber itself has a standard pumping speed of 106 l/s and a volume of 187 liters. APPLIED MATERIALS P 5000 is composed of polysilicon, titanium silicide, and silicon nitride materials. APPLIED MATERIALS P-5000 utilizes two primary imaging configurations; the circular-view image processor and the plan-view image processor. The circular-view processor is designed for wafer etching and other patterning processes, while the plan-view processor allows for the complete substrate deposition process. Both processors rely on dual-source illumination, allowing for a detailed imaging of the entire chamber. P-5000 is powered by two FM-300 electronic power supplies, with a range of up to 800 watts and a precision regulation of 1%. High-end capacitors and rotameters allow for precise control of the etching and deposition rates. AMAT / APPLIED MATERIALS P-5000 utilizes an all-around vacuum sealing system, comprising a combination of gas baffles, heated slides, heaters and resistors, and special cryo-coolers. This seals all process components, eliminating potential leakage points, and allows for reliable pulsed etching up to 800W. The system is installed in a modern cleanroom and offers excellent contamination control, with potential minimum flow rates of 3ppb of particles at a rating of 0.5 microns. An independent load-lock chamber provides excellent wafer processing, while the easy-to-use graphical user interface allows for quick and efficient operation. P 5000 is designed to meet the highest standards for quality assurance and production efficiency, offering much better yields and reduced defects for large-scale production. Its advanced reactor design provides excellent control, reliability and performance, making it one of the most reliable tool sets in its class.
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