Used AMAT / APPLIED MATERIALS P5000 #9236969 for sale

ID: 9236969
Wafer Size: 8"
Vintage: 1998
PECVD System, 8" Process: Passivation Chamber type: DLH CIM Linked Main frame Load lock SMIF System: ASYST ARM-2200 V111S Handler system: Robot assembly Process chamber: (3) CVD Deposition chambers A, B & C (3) Primary generators (3) RF2 Generators & matches (4) Ebara pumps Heat exchanger Mini SBC board SBC Board SEI Board (2) AI Boards (2) AO Boards VGA Board (4) Stepper driver boards (2) Digital I/O boards Buffer I/O board (2) Optical sensor boards (4) Chopper driver boards (3) Baratrons LAMDA Power supply Hard Disk Drive (HDD) Wiring distribution board Pneumatic board Loader interconnect board (2) TC Gauge boards +12V DC Power supply +15V DC Power supply -15V DC Power supply AI MUX Board (3) RF Generators Controller distribution board Encoder interface board System electronic back plane Robot blade assembly Facility: A10S Loadlock pump A70W Process pump Incoming power: 208 VAC Heat exchanger temperature set point: 65 Buffer: LPT / Indexer: ARM-2200 H112S Center finder Storage elevator: (8) Slots LL Robot type: Metal Load lock actuator: IO Door Chamber actuator: 0010-70162 CDA Pressure for buffer: 60 psi Process chamber: RF 1 Generator: ENI OEM-12B RF 2 Generator: RFPP 7520572050 RF Match: AMAT / APPLIED MATERIALS Automatch 0010-09750 Pressure manometer: MKS 10T (122BA-001000EB-S) Throttle valve / PCV Model: VEXTA PX245-02AA-C4 TC Part number: 3310-01074 Chuck type: P-Chuck Chuck part number: 0010-38437 Process temperature: 400°C MFC Gases: C2F6: 10 SLM SIH4: 3000scc NH3: 300scc N2: 10 SLM N20: 3000 SCC N20 (G): 200 SCCM PH3: 300 SCC DPA Included Endpoint: 0190-09472 CDA Pressure for chamber: 60 psi 1998 vintage.
AMAT / APPLIED MATERIALS P5000 is a reactor that is used to manufacture semiconductor devices. It uses advanced technology to provide precise thermal control and a platform for chemical vapor deposition (CVD). The reactor is designed to ensure uniform temperatures and reduce non-uniformity throughout the growth of the material or device. AMAT P-5000 is a single-wafer reactor that encompasses three key characteristics: uniformity, temperature control, and substrate flexibility. The reactor consists of several components: a quartz chamber, a susceptor mount, a control equipment, a heating element, and a cooling system. The quartz chamber allows the oxidation or deposition of a film onto the substrate under controlled Conditions. The susceptor mount holds the wafer during the processing, and is designed to provide a uniform temperature distribution. The control unit enables precise temperature control and a platform for CVD. The heating element is designed to provide uniform temperature through the entire wafer. The cooling machine is used to reduce substrate temperature and enable process stability. APPLIED MATERIALS P 5000 reactor has a wide range of advantages, such as enhanced performance, high repeatability, increased throughput, and improved yields. It is also capable of producing devices at high temperatures, with excellent uniformity and repeatability. Additionally, P5000 reactor is ideal for wafer bonding, as it ensures a very uniform temperature and greater precision in the handling of the bonds. In conclusion, AMAT P5000 reactor is a crucial component of the semiconductor manufacturing process. Its ability to provide uniform temperatures and reduce non-uniformity throughout the growth of the material or device makes it extremely useful and cost-effective. As technology advances, it is expected that P 5000 reactor will become even more advanced and efficient in producing semiconductor devices.
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