Used AMAT / APPLIED MATERIALS P5000 #9236969 for sale
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ID: 9236969
Wafer Size: 8"
Vintage: 1998
PECVD System, 8"
Process: Passivation
Chamber type: DLH
CIM Linked
Main frame
Load lock
SMIF System: ASYST ARM-2200 V111S
Handler system: Robot assembly
Process chamber:
(3) CVD Deposition chambers A, B & C
(3) Primary generators
(3) RF2 Generators & matches
(4) Ebara pumps
Heat exchanger
Mini SBC board
SBC Board
SEI Board
(2) AI Boards
(2) AO Boards
VGA Board
(4) Stepper driver boards
(2) Digital I/O boards
Buffer I/O board
(2) Optical sensor boards
(4) Chopper driver boards
(3) Baratrons
LAMDA Power supply
Hard Disk Drive (HDD)
Wiring distribution board
Pneumatic board
Loader interconnect board
(2) TC Gauge boards
+12V DC Power supply
+15V DC Power supply
-15V DC Power supply
AI MUX Board
(3) RF Generators
Controller distribution board
Encoder interface board
System electronic back plane
Robot blade assembly
Facility:
A10S Loadlock pump
A70W Process pump
Incoming power: 208 VAC
Heat exchanger temperature set point: 65
Buffer:
LPT / Indexer: ARM-2200 H112S
Center finder
Storage elevator: (8) Slots
LL Robot type: Metal
Load lock actuator: IO Door
Chamber actuator: 0010-70162
CDA Pressure for buffer: 60 psi
Process chamber:
RF 1 Generator: ENI OEM-12B
RF 2 Generator: RFPP 7520572050
RF Match: AMAT / APPLIED MATERIALS Automatch 0010-09750
Pressure manometer: MKS 10T (122BA-001000EB-S)
Throttle valve / PCV Model: VEXTA PX245-02AA-C4
TC Part number: 3310-01074
Chuck type: P-Chuck
Chuck part number: 0010-38437
Process temperature: 400°C
MFC Gases:
C2F6: 10 SLM
SIH4: 3000scc
NH3: 300scc
N2: 10 SLM
N20: 3000 SCC
N20 (G): 200 SCCM
PH3: 300 SCC
DPA Included
Endpoint: 0190-09472
CDA Pressure for chamber: 60 psi
1998 vintage.
AMAT / APPLIED MATERIALS P5000 is a reactor that is used to manufacture semiconductor devices. It uses advanced technology to provide precise thermal control and a platform for chemical vapor deposition (CVD). The reactor is designed to ensure uniform temperatures and reduce non-uniformity throughout the growth of the material or device. AMAT P-5000 is a single-wafer reactor that encompasses three key characteristics: uniformity, temperature control, and substrate flexibility. The reactor consists of several components: a quartz chamber, a susceptor mount, a control equipment, a heating element, and a cooling system. The quartz chamber allows the oxidation or deposition of a film onto the substrate under controlled Conditions. The susceptor mount holds the wafer during the processing, and is designed to provide a uniform temperature distribution. The control unit enables precise temperature control and a platform for CVD. The heating element is designed to provide uniform temperature through the entire wafer. The cooling machine is used to reduce substrate temperature and enable process stability. APPLIED MATERIALS P 5000 reactor has a wide range of advantages, such as enhanced performance, high repeatability, increased throughput, and improved yields. It is also capable of producing devices at high temperatures, with excellent uniformity and repeatability. Additionally, P5000 reactor is ideal for wafer bonding, as it ensures a very uniform temperature and greater precision in the handling of the bonds. In conclusion, AMAT P5000 reactor is a crucial component of the semiconductor manufacturing process. Its ability to provide uniform temperatures and reduce non-uniformity throughout the growth of the material or device makes it extremely useful and cost-effective. As technology advances, it is expected that P 5000 reactor will become even more advanced and efficient in producing semiconductor devices.
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