Used AMAT / APPLIED MATERIALS P5000 #9238728 for sale
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ID: 9238728
Wafer Size: 8"
Vintage: 1993
CVD System, 8"
Process: SION
Process chamber A, B & D: SION
RF Generator type:
Chamber A & B: OEM-12B
Chamber D missing
Dry pump type:
Chamber A, B, D & L/L: EDWARDS QDP40 / QMB250
Throttle valve type:
Chamber A, B & D: Non heated
VME System:
20 Slots
CPU: Synergy
Video: VGA
SEI
(2) AI
(2) AO
(4) DI/DO
(4) Steppers
Hard Disk Drive (HDD)
Floppy Disk Drive (FDD), 3.5"
Process kit type:
Chamber A, B & D: SIN
Manometer type:
Chamber A: MKS 122B 11441S
Chamber B & D: MKS 122B 11441
RF Matching box type:
Chamber A, B & D: 0010-09750 DR
System electronic type:
(2) TC Gauges
Buffer I/O
AI MUX
(2) OPTO
(4) Choppers
+12VPS
+15VPS
-15VPS
Storage elevator: 8 Slots
Cassette handler: Phase III, top clamp
Robot: Phase III
Blade: Phase III
I/O Wafer sensor
Load lock purge
Heat exchanger:
AMAT0:
Connect to chamber A, B & D: Wall / LID
Main frame front type: Through-the-wall
Standard remote frame
TC Gauge type:
Chamber-A Rough: VCR
Chamber-B Rough: VCR
Chamber-D Rough: VCR
L/L Rough: VCR
L/L Chamber: VCR
Lamp module type:
Chamber A, B & D: STD 0010-09337
Mini-con
Magnet driver type:
Chamber A: P/N 0010-50169
Chamber B & D: P/N 0015-09091
Gas panel type: (28) Gases
MFC Type (Main):
Chamber / Flow Gas / Flow size / Calibration gas / Maker / Model
B / SIH4 / 500 / N2 / STEC / SEC-4400
B / N2 / 5000 / N2 / STEC / SEC-4400
B / NF3 / 1000 / N2 / STEC / SEC-4400
B / N2O / 300 / N2 / STEC / SEC-4400
A / SIH4 / 500 / N2 / STEC / SEC-4400
A / N2 / 5000 / N2 / STEC / SEC-4400
A / NF3 / 1000 / N2 / STEC / SEC-4400
A / N2O / 300 / N2 / STEC / SEC-4400
D / SIH4 / 500 / N2 / STEC / SEC-4400
D / N2 / 5000 / N2 / STEC / SEC-4400
D / NF3 / 1000 / N2 / STEC / SEC-4400
D / N2O / 300 / N2 / STEC / SEC-4400
MFC Type (Remote):
Chamber / Flow Gas / Flow size / Calibration gas / Maker / Model
B / N2O / 1000 / N2 / STEC / SEC-4400
B / N2O / 3000 / N2 / STEC / SEC-4400
A / N2O / 1000 / N2 / STEC / SEC-4400
A / N2O / 3000 / N2 / STEC / SEC-4400
D / N2O / 1000 / N2 / STEC / SEC-4400
D / N2O / 3000 / N2 / STEC / SEC-4400
1993 vintage.
AMAT / APPLIED MATERIALS P5000 is a reactor, specifically a long-barrel, high-temperature diffusion furnace, used for the deposition of materials, such as silicons, glass, and ceramics, onto substrates. This equipment is designed to provide exceptionally stable operation, and features several features which makes it well-suited for use in a variety of industries. AMAT P-5000 is designed to provide rapid thermal processing, which is highly beneficial in producing high-quality products, and ensuring a low-defect rate. This is achieved thanks to a multitude of features, such as a fan-forced air circulation system, a digital touch-screen interface, and an array of user-programmable settings. The digital touch-screen interface is easy to use and allows for quick control over operation and customization of settings. APPLIED MATERIALS P 5000 also features a long-barrel design, which ensures consistent temperature across the entire barrel. Temperature uniformity is further enhanced thanks to the recirculating unit, which maintains a consistent and uniform temperature throughout the barrel. Additionally, this machine includes a host of safety features, such as auto shut-off and automatic pressure relief devices, in order to ensure a safe operation. AMAT P 5000 is designed to accommodate a variety of materials, such as silicon, glass, and ceramics. This enables the reactor to be employed in a range of different industries, such as electronics, automotive, and aerospace, in order to produce finished products of an exceptionally high quality. Overall, APPLIED MATERIALS P5000 is a long-barrel, high-temperature diffusion furnace, designed to provide rapid thermal processing and high-quality products. This reactor features a range of technologically advanced features, such as a fan-forced air circulation tool and a digital touch-screen interface, in order to ensure safe and consistent operation. It is able to handle a variety of different materials, and can thus be successfully employed in multiple industries in order to produce finished products of an exceptional quality.
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