Used AMAT / APPLIED MATERIALS P5000 #9294469 for sale

ID: 9294469
Wafer Size: 8"
Vintage: 1996
CVD System, 8" Process: LTO CVD, TEOS 1996 vintage.
AMAT / APPLIED MATERIALS P5000 is a complete, dual-wafer, parallel-plate reactor equipment that is used in semiconductor and advanced optoelectronic device fabrication. Its platforms are highly configurable, allowing for precision and control over multiple process steps simultaneously. AMAT P-5000 is made up of several key components. The physics package, or PCB, is the main processor of the system, providing control over all other components and process parameters. This includes an integrated gas-mixture-control unit, temperature and pressure sensors, and a vacuum machine with a cold trap. APPLIED MATERIALS P 5000 uses a parallel-plate reactor design, with two symmetric electrostatic plates, or electrodes, placed at either side of the chamber. This design allows for higher processing efficiency, lower process pressures, and better confinement of the reactant gases. The plates are fabricated from materials such as graphite, ceramic, or metal. As the substrates are placed between the plates, the temperature and/or pressure of the process chamber can be regulated with air or gas mixtures, regulated by the PCB, to manipulate the growth rate of the desired material. APPLIED MATERIALS P-5000 utilizes RF energy to aid in the ionization of the reactant gas, allowing it to contribute to thin-film deposition. The RF power to the electrodes can be modulated to investigate material growth under different conditions. APPLIED MATERIALS P5000 also provides integrated metrology capabilities. It is equipped with several optical detection tools that measure the thinnest layers of a material. These tools can detect the interference of light passing through the sample as well as measure the thickness of deposited layers and the surface area of the sample. This can be extremely useful in exposed layer characterizations and optical performance measurements. AMAT / APPLIED MATERIALS P-5000 is an extremely efficient reactor tool that offers a tightly-controlled process environment to fabrication of semiconductor and optoelectronic devices. With its combination of integrated process control, modular reactor design, and metrology capabilities, P-5000 is a powerful tool for advanced device fabricators.
There are no reviews yet