Used AMAT / APPLIED MATERIALS P5000 #9351761 for sale
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ID: 9351761
Wafer Size: 8"
Vintage: 1996
CVD System, 8"
Process: LTO CVD, TEOS
1996 vintage.
AMAT / APPLIED MATERIALS P5000 is a state-of-the-art reactor designed to enable accurate and efficient sample processing in semiconductor production. Using a powerful inverted linear design and interchangeable pods, AMAT P-5000 enhances the production process by providing the highest levels of accuracy and precision. The machine has an ultra-stable vacuum-clad sample stage, which is capable of supporting up to four wafers and allows for the highly repeatable movement of substrates in all directions. The digital-controlled, capacitively coupled, low-temperature load-lock facilitates the controlled transfer of wafers in and out of the reactor, as well as being thermally protected from backside contamination. APPLIED MATERIALS P 5000 achieves superior temperature uniformity, thermal precision and temperature range through its advanced dual-heating equipment consisting of two RuO¬2-coated molybdenum heating bars and a high-power quartz tube. The superior temperature uniformity and precision achieved by AMAT / APPLIED MATERIALS P 5000 helps ensure accurate substrate processing results even when dealing with highly sensitive processes. Exhaustive safety measures make P5000 one of the safest reactor designs available. Its state-of-the-art alarm system takes into account any changes or irregularities with temperatures, vacuum pressures and other unit parameters and notifies personnel of any irregularities as soon as any changes take place. P-5000 also features a patented masking technology that reduces the risk of exposing personnel to unwanted particles. In addition to its superior accuracy and precision, AMAT P 5000 also enables fast and reliable sample processing with short cycle times and a broad range of process options. This high-performance machine is perfect for use in high-volume production environments or facilities with improved processing speeds. To ensure superior performance, AMAT / APPLIED MATERIALS P-5000 is designed with an open architecture that enhances machine flexibility and integration. The reactor is equipped with high-precision, multi-sensor data acquisition hardware and software capable of monitoring every stage of the process to ensure that all parameters remain within the set limits. Overall, APPLIED MATERIALS P-5000 is an industry-leading reactor for production environments.
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