Used AMAT / APPLIED MATERIALS P5200 #9231616 for sale

AMAT / APPLIED MATERIALS P5200 is a parallel plate plasma reactor for the processing of advanced material substrates. The equipment is designed for high-throughput operations in a tightly integrated environment, allowing for the deposition of thin films in a variety of configurations. AMAT P5200 features a process chamber designed to accommodate up to 10 substrates per plasma batch, allowing for the deposition of uniform thin films regardless of the application or substrate topology. The chamber is comprised of two flat parallel gold plated stainless steel plates featuring a low-resistance profile and an exhaust port for the evacuation of any resulting vapors. The front plate is temperature controlled and features sealable notch openings that are used to inject the process and process byproduct gases. APPLIED MATERIALS P5200 features a powerful Substrate-BIAS-Unit (SBU) for creating a plasma sheath between the parallel plates using a mixture of Argon and Ozone gases. The SBU can generate either a planar or field uniform plasma, depending on the processing needs and requirements. This bias voltage enables higher deposition rates and greater uniformity over the surfaces of the substrate even with complex 3D topologies. P5200 is configured with a large-area Process Monitoring System (PMS) providing real time monitoring of the process parameters including, the bias voltage, substrate temperature, particle densities, etc. The PMS also aids in closed-loop feedback and the adjustment of the process as it progresses, and can provide valuable data for process optimization. The unit is also equipped with an industry leading EOS-Analysis software, providing the ability to run rigorous simulations of the deposition process in order to determine the best set of conditions for achieving a desired result. This software package includes the capability to model and adjust for various depths, coverage, thickness, and other critical parameters individually. AMAT / APPLIED MATERIALS P5200 offers a highly reliable and repeatable process, ensuring consistent results and improving production efficiencies. The machine is user friendly, allowing for fast start-ups and is continuously improved with further upgrades.