Used AMAT / APPLIED MATERIALS Process kit for Endura 5500 #293656254 for sale

AMAT Process kit for the Endura 5500 Reactor is an essential accessory for an Endura 5500 equipment. It includes essential tools and components for performing various steps in a photoresist or etch process, such as stripping, cleaning, deposition and metrology. The process kit includes items such as a handling robot, an evacuable module, a gas delivery system, a number of capacitors and an in-situ metrology unit. The handling robot can be positioned near the Endura 5500 reactor and is used to move wafers and cassettes into and out of the reactor chamber. The evacuable module is equipped with an evacuable chamber for sample evacuations and other operations, and a massive turbo molecular rotor to achieve rapid purge speeds. The gas delivery machine incorporates a number of precise controllers and valves to supply the correct gas pressure to the reactor chamber. The capacitors facilitate the direct electrical connection to the Endura 5500 reactor and the metrology tool enables automated measurements of film thickness during the production process. The included components are designed to allow users to implement multiple film stacks, which reduce the engineering time required for developing an Endura 5500 process. The process kit allows users to quickly optimize their recipes and target cycles, as well as performing data logging and assessment for each recipe. The process kit also includes a clean room that enables the installation of the Endura 5500 components without any contamination. The clean room includes a grid of stations equipped with thermal, electrical, and gas lines, and two airlocks containing special filters and blowers. The asset also includes a grounding model and an ion-neutralizing equipment, which minimizes charging on processed wafers. This process kit is a critical component for an Endura 5500 system, as it ensures that the process will be repeatable and reliable. It is designed to provide a safe and efficient working environment that can handle a variety of complex processes.