Used AMAT / APPLIED MATERIALS Producer GT #293600877 for sale
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AMAT / APPLIED MATERIALS Producer GT is a single-wafer rapid thermal processing (RTP) equipment that is used for semiconductor device fabrication. The system is designed for high performance and throughput and features multiple gas options and the ability to provide rapid multi-cycle temperature profiling. The RTP unit utilizes a quartz tube as the process chamber, with a graphite susceptor to transport the heat from an electrically-powered halogen lamp to the wafer. The susceptor is equipped with a thermocouple and gas injection nozzles that provide precise temperature control and uniform gas delivery. The gas flow is delivered through a molecular beam shield and can be programmed to provide a precision mix of ambient air and hydrogen, nitrogen, or other process gases. AMAT Producer GT also features a backside cooling facility that ensures that the temperature of the wafer never exceeds a critical level. It is also equipped with advanced optical sensing technology to monitor the backside of the process chamber and detect any potential over-heating of the wafer. APPLIED MATERIALS Producer GT also has a fully integrated, intuitive wafer handling machine to ensure that the wafer slides into and out of the quartz tube in a safe and error-free fashion. The tool can also be configured with a number of options such as sample loading/unloading robots, wafer mapping systems, and multi-zone preheat systems. Furthermore, Producer GT supports a wide range of process temperatures and rapid thermal excursions, making it ideal for both high-temperature process recipes and gentle processing. It also offers auto-leveling of the susceptor platform to ensure that the wafer-to-susceptor distance is held within a tight tolerance. The asset is equipped with advanced monitoring and diagnostic capabilities that allow process engineers to remotely monitor their process recipes, monitor the environment and process results, and control the model from a central location. AMAT / APPLIED MATERIALS Producer GT also features built-in safety features such as an inert gas purging equipment, overheat protection, and automatic shut-off in the event of a power failure. Overall, AMAT Producer GT is a robust, reliable system that provides a fast and efficient RTP processing solution for semiconductor device fabrication. It is designed for optimal performance and accuracy, and is well suited for a range of applications such as rapid thermal annealing, rapid thermal oxidation, and shallow junction formation.
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