Used AMAT / APPLIED MATERIALS Producer GT #293618158 for sale

ID: 293618158
Vintage: 2008
Plasma Enhanced Chemical Vapor Deposition (PECVD) system EFEM Load port PC (2) KAWASAKI 3NX510B-D001 Desk handlers KAWASAKI 30D61I-A003 Holding controller Transformer BROOKS Mag8 0190-25011 Robot Robotic arm (3) RPS 3L (3) Apex 3013 RF Generator (3) Heaters (3) Chambers (3) Power boxes missing Gas configuration: NF3 1000sccm NF3 1000sccm Ar 5000sccm (2) O2 15000sccm C3H6 3000sccm He 5000sccm He 15000sccm N2 15000sccm Ar 15000sccm 2008 vintage.
AMAT / APPLIED MATERIALS Producer GT is an advanced thermal evaporator equipment designed to deposit thin films on a variety of substrates. It is used primarily in electronic materials and components manufacturing. AMAT Producer GT offers excellent reliability and precision for the deposition of thin films to the exact specifications of the manufacturer. The system is capable of depositing a wide range of materials including silicon, aluminum, titanium and other metals. APPLIED MATERIALS Producer GT utilizes an electron-beam evaporator to deposit highly uniform thin films on the substrate. The electron-beam works by heating the source material in an electron crucible and then launching an electron beam to evaporate material onto the substrate. The beam can be focused on to one part of the substrate to deposit thicker films, or the beam can be spread across multiple areas to produce more uniform films. The beam is capable of producing films with thicknesses that range from sub-nanometer to micro-meter. The temperature of the source material is controlled by a graphite susceptor, which is heated by high frequency induction. This combination of high frequency induction and susceptor heating provides precise temperature control and uniform deposition. Producer GT also includes a vacuum unit for evacuating the chamber and a baseplate for mounting the substrate. The vacuum machine includes a turbo pump, muffler, and an active mechanical pump for coaxial evacuation. This enables the evacuating process to be precisely controlled to maintain the desired atmosphere for film deposition. Finally, AMAT / APPLIED MATERIALS Producer GT is equipped with a high-resolution mass spectrometer for leak detection and a redundant back-up tool for enhanced process control. The high-resolution mass spectrometer is designed to enable the accurate determination of the total process pressure to enable precise process repeatability. AMAT Producer GT is an advanced and reliable thermal evaporator asset offering precision and uniformity for the deposition of thin films. It is ideal for the manufacture of sophisticated electronic materials and components.
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