Used AMAT / APPLIED MATERIALS Producer GT #9227461 for sale
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AMAT / APPLIED MATERIALS Producer GT Reactor is an industry-leading integrated single-wafer inductively coupled plasma (ICP) equipment designed for semiconductor device fabrication. Featuring an ICP source and an effusion cell, this compact reactor offers high throughput of up to 80 wafers per hour and precise process control for creating robust and reliable device structures. The system also features a proprietary wafer-handling technology, Aerosol Jet Coater, which provides superior consistency and homogeneity for blanket coatings and etch rates. AMAT Producer GT ICP source has been designed for optimized process performance and yield control, featuring a custom-engineered coil technology that minimizes power fluctuations while increasing plasma uniformity between wafers. This unit also has a unique automatic power control algorithm (APC) to further improve process precision and repeatability. Furthermore, the high frequency modulation capability of the source allows for fine tuning of the plasma distribution to further improve process predictability and repeatability. The Aerosol Jet Coater uses a proprietary droplet technology to uniformly deposit thin film implants on both sides of the wafer. This innovative technology enables high precision, adjustable film thicknesses up to 4 μm, with uniformity of better than 2%. Furthermore, it features adjustable area coverage levels, enabling exact process control of the film deposition. APPLIED MATERIALS Producer GT processor also features a multi-tube effusion cell for controlled element source homogeneity, to reduce interface resistance and junction leakage. The machine also has an exhaust chamber that ensures optimal gas flow to achieve maximum film uniformity while ensuring the elimination of all particles. Producer GT reactor is well suited for a wide range of nanoscale fabrication applications, including MEMS, nanostructures, metal oxide semiconductors, nanostructured materials, and optoelectronic materials. The tool can be integrated into a modular tool configuration to offer an end-to-end process solution for a variety of semiconductor device fabrication needs. With its superior process control, feature-rich capabilities, and tight uniformity control, AMAT / APPLIED MATERIALS Producer GT reactor is the ideal choice for fabricating cutting-edge nanoscale devices.
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