Used AMAT / APPLIED MATERIALS Producer GT #9233074 for sale

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ID: 9233074
Wafer Size: 12"
Vintage: 2007
CVD System, 12" Control system: Device net protocol EFEM Communication: SFEM Wafer sliding detection sensors: LCF Signal tower: Common SPEC Door interlock sensor Pressure difference interlock: LL->TM->Chamber Slit valve: L-Motion No viton o-ring Air regulator EYE Mark display on M/C: LP1, LP2 Chamber A / B / C Gas box Turbo pump RPC RF Generator Match Electric valve & Load lock & Tm installed TM Blade: ALN No o-ring in chamber region No gate valve o-ring & Air regulator Missing / Detaching parts: (6) HARP AIN Heaters P/N: 0010-59796 Q-Code Q400-168177 FI. RT, FE Computer Practical preventing system in EFEM: 0.065µm Filter / Venting air Process: HARP, BPSG, ARC, P-TEOS Blue electrostatic chuck: Low temp 300° C Turbo screen location: Below chamber Heat exchanger: SUS Connector & Power vaccine Upgrade list pin mechanism: Dual lock list pin RF Reflect filter system / BIAS: Auto match Heat exchanger coolant: ZT180 Chamber lift speed: Stepping motor ESC Water leak RF Generator reflect power: Below set point 0.5% Input / Output port stage: OHT FOUP Capability: (25) Slots System monitor: LCD Remote monitor: Keyboard, LCD Gas line: 5- RA surface mounted c-seal Gas configuration: C3H6, O2, NF3 Gas line polishing: E/P 5-RA Filter: SUS316 SS/NF3 Hastelloy Gas box temperature: Display by digital gauge Negative voltage MFC signal: Display interlock Chamber pump: SAMSUNG Load lock & TM Pump Tempered type: Capacitance manometer for chamber pressure control Pressure transducer for chamber: ATM Switch TM & Load lock fore line shut-off valve: Electric valve General power & UPS Power: AC Rack design change for VDP Ground for D-net: Chassis Circuit safeguard: Circuit breakers Internal utility line color: SEMI Standard Head exchanger: Pressure control 2007 vintage.
AMAT / APPLIED MATERIALS Producer GT is a vertical electrochemical deposition reactor engineered to offer deposition process solutions for the manufacture of advanced circuitry. This reactor is a beaked, cylindrical vessel designed to provide quality deposition processes on a full range of substrates such as Aluminum, Copper and Titanium. It comes in two models, AMAT Producer GT-800 and APPLIED MATERIALS Producer GT-1000, and features a tunable process chamber for multiple process capabilities such as copper plating, electroless copper plating, ALD, and CVD processes. The design is based on a high-aspect ratio beaker architecture that combines a vertical vessel, low thermal mass capacitor, and integrated substrate support. This geometry creates a uniform, scalable process with low-resistance electrical contacts that are in contact with a uniform space between the contacts and the walls of the reaction vessel. Producer GT also comes with advanced customizable software and hardware options for accurate process control. This allows for easy operation and reproducible electroplating results with realistic and consistent process parameters. The process chamber is protected from contamination thanks to strict process controls and vacuum wash-down procedures. The design combines an optimized, user-friendly liquid delivery equipment with sophisticated pump control logic, allowing for precise, consistent, repeatable electroplating solutions at high throughput. The reactor is equipped with advanced temperature management for accuracy and repeatability of programs, as well as an integrated humidity control system which ensures controlled moisture levels during the process. The advanced control unit also provides real-time monitoring of the process with measurements in time, temperature, pressure, thickness, and other critical process parameters. The variety of customizable options on AMAT / APPLIED MATERIALS Producer GT reactor provides exceptional electrochemical deposition solution capabilities. It is capable of depositing a wide range of materials from a broad range of substrates with exceptional process control. The advanced, user-friendly machine offers increased flexibility and repeatable results.
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