Used AMAT / APPLIED MATERIALS Producer GT #9275950 for sale
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ID: 9275950
Wafer Size: 12"
Vintage: 2012
System, 12"
EFEM
O3 Rack
AC Rack
NPP Rack
Main TM
HARP USG Chamber
Monitor
(3) Part boxes
(2) KAWASAKI 3NS510B Atmospheric robots
UPS Interface
Front Interface (FI):
(3) Part boxes
WIP Delivery type: OHT
Chamber A, B and C twin: HARP USFG
Local center finder
Robot blade and type: FX Dual deck ceramic
Chamber A, B and C:
HA12 Dual zone heater
Face plate: Water cooled
Manometer: 20/1000 Torr
Clean type (RPS): MKS FI80133
No NDTR endpoint
No DPA
Foreline, 2"
ISO: NORCAL 021010-1
TV: MKS 683B-31931
Monitor: Stand alone
Chamber C: AX8407A Ozone generator
Ozone generator rack: Eterna
Gas delivery - APF GP:
MFC: GF 125
Gas feed: Bottom
Gas panel cabinet exhaust: Bottom exhaust
NIPPON Filters
Manual valves: FUJIKIN
Pneumatic valves: FUJIKIN
Liquid source
No regulated gas panel
No interlock indicator
No transducers
No display gas pallet
Gas pallet configuration:
Chamber A, B and C:
MFC: N2-Purge
Gas / Size
NF3 / 15000
AR / 15000
N2 / 5000
O2 / 30000
HE / 30000
N2 / 50000
LFM: STEC
TEOS: 7g
Spare parts included
Missing parts:
(2) AX8407A Ozone generators
(6) 0246-22744 Heater lift assemblies
0240-80219 Ring
(2) Ceramic heaters
Chamber B: Lift assembly
Chamber B and C: (2) Controller boxes with board
Power supply: 208 V, 50/60 Hz
2012 vintage.
AMAT / APPLIED MATERIALS Producer GT is a highly advanced next-generation reactor for thin-film deposition of photovoltaic materials. It is designed to enable the full automation of photovoltaic (PV) manufacturing processes, from material precursors to high-efficiency PV cells and modules. The combination of automation, flexibility, and high performance makes AMAT Producer GT a revolutionary tool for PV manufacturing. APPLIED MATERIALS Producer GT is based on multiple evolutionary generations of technology and innovation. The advanced 10th-generation platform is composed of a fully automated, dedicated multi-tool reactor with integrated process modules and software control. Features and advancements include substrate-step displacement, substrate size/shape adapter, advanced gas flow control, and low-cost source integration. The integrated process modules included in Producer GT are used to open up new opportunities for PV cell and module generations. These state-of-the-art modules provide the highest levels of performance and flexibility that are necessary for successful production in large capacity and at high throughput. The process modules allow for the deposition of ultra-thin film materials and the precise control of PV material layer thickness and composition. AMAT / APPLIED MATERIALS Producer GT can also enable the production of double and triple junction Thin Film Solar Cells and modules with excellent efficiency. The software control platform also enables advanced operation in combination with the process modules. This includes both manual and automated operation with real-time process monitoring, troubleshooting, and diagnostics. The full automation system enables faster throughput, which can reverse the cost of production, increase yields, and provide tight control over all parameters for maximum output. In synthesis, AMAT Producer GT offers numerous advantages and benefits that enable the efficient production of PV materials. The platform automates the deposition process, reduces error and cost, and drives higher efficiency PV cell and module production. It is the perfect choice for an organization seeking to optimize the production of high-efficiency PV cells and modules.
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