Used AMAT / APPLIED MATERIALS Producer GT #9296916 for sale
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AMAT / APPLIED MATERIALS Producer GT is a type of reactor used in semiconductor manufacturing. It is a chemical vapor deposition (CVD) tool designed to deposit ultra-low temperature layers of dielectric material onto substrates. The reactor utilizes a proprietary induction heating platform and low-pressure process chamber to ensure safe, repeatable film deposition with excellent thermal performance. In addition, the tool is designed for ease of use and excellent throughput. AMAT Producer GT is equipped with a high power electronic generator, an induction coil and a controlled vacuum environment. Inside the reactor chamber, a plenum is used to distribute process gas. In practice, deposition occurs when the substrate is positioned at an optimal distance from the induction coil and held inside the reactor chamber. After the induction coil is activated, process gas is introduced into the chamber, creating a low pressure environment. Then, a plasma is generated between the substrate and the induction coil, providing the necessary heat and energy to deposit thin films on the substrate. APPLIED MATERIALS Producer GT is designed to consistently deposit dielectric thin films at low substrate temperatures. Film deposition rates are enhanced by the addition of an RF bias to the induction coil, which helps to stabilize electron emission from the substrate surface. The producer also maintains temperatures as low as 40°C, allowing for good film faceting and excellent dense conformal deposition. In addition, the tool is also capable of process scaling, offering repeatable process performances over a wide range of chamber sizes. This allows the tool to be used in production of any small or large substrates. As an added bonus, the producer offers an impressive capacity for the deposition of multiple thin films in one processing cycle, improving productivity and reducing costs. In short, Producer GT is a robust and reliable CVD tool designed for excellent thermal performance, ease of use and excellent throughput.
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