Used AMAT / APPLIED MATERIALS Producer GT #9352398 for sale
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AMAT/AMAT / APPLIED MATERIALS Producer GT is a robust, high throughput plasma etch reactor designed for semiconductor processing applications. The equipment utilizes an Advanced Source Technology (AST) Process Module, allowing quick changeover and integration for different etch processes. The plasma chamber is optimized for high etch rate and uniformity across a wide range of wafer sizes. The system is powered by a fast Turbo Plasma (TP) generator providing uniformity across the entire bowl. AMAT Producer GT is equipped with state-of-the-art motion control and automated process monitoring providing highly accurate, repeatable process results. Unit features include high-precision, bi-directional motion control and wafer handling to enable high-fidelity and tightly controlled plasma process steps. In addition, APPLIED MATERIALS Producer GT is equipped with an advanced in-situ endpointing capability, providing predictive process control for critical process steps. Producer GT has a Penta-tube Viewport allowing significant reduction in the time required to observe wafer processing by eliminating time-consuming wafer loading and unloading. The Penta-viewPort provides a large viewing area to observe wafer operations from a range of angles. The wafer is positioned along an out-of-role axis to ensure good viewing angles. AMAT / APPLIED MATERIALS Producer GT is designed for industrial-grade production and features a tool structure that is completely sealed by a patented Substrate Shield Technology. This feature effectively isolates the interior plasma environment from any potential contamination or abatement. The machine also features an advanced remote maintenance tool, allowing for remote diagnosis and efficient repairs. AMAT Producer GT is equipped with an integrated CDA asset, offering advanced process control capabilities. In addition, APPLIED MATERIALS Producer GT features APPLIED MATERIALS High-Speed Internal Gas Insulation (HSIGI) Technology, to provide reliable and repeatable results. This allows for uniformity and greater control over the process results. The model also features multi-point temperature control and monitoring to ensure precise and consistent temperatures across the configuration. Producer GT is a powerful, reliable and efficient etch reactor, designed to provide optimal process results for semiconductor device manufacturing. It is ideal for production scale-up and process transfers, offering significant time savings and process improvements. The equipment provides extremely repeatable results, and the combination of advanced process modules, motion control, and endpointing capabilities allows for highly precise results.
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