Used AMAT / APPLIED MATERIALS Producer III #9019704 for sale
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ID: 9019704
Wafer Size: 12"
Vintage: 2002
Dual SACVD chamber, 12"
P/N; 0242-14523
Process: BPSG
Iso Valve 0060-21442 rev b / 0060-76188 rev b
Throttle Valve 0010-14682
Foreline straight 0050-50173
Foreline elbow 0040-40886
Gas Manifold 0021-30143
LFM/Injector Manifold 3030-08008
Astron 0920-00057
Heater Transformer 211-0111-120 5 KVA
Heater Transformer 211-0101-120 5KVA
Heater Lift 0010-01418
Heater Driver 0090-00569
Pneumatic Switch Bank
Heater Ceramic 0040-04048
Heater Ceramic 0040-04048
Heater Filter 0090-01267,001
Specifications:
LFMs and injectors: STEC
TEOS, TEB, TEPO liquid delivery injection valves / lines
HFG: 0920-00107 AE 3000 RFG, AE PN: 3156114-003
LFG: ENI quanta-10D-01M1
Heat Controller: Johnson Electric Powerformer – Outdoor type 3R U/L
Gas box configuration:
Line 1: O3
Line 2: O2
Line 3: N2
Line 4: NF3
Line 5: N2
Line 6: Ar
Line 7: Empty
Line 8: N2
Line 9: He
Line 10: N2
Includes AMAT part numbers:
0040-03005
0040-61823
0040-51824
0040-03439
0040-01618
0021-06499
0040-04048
Missing parts:
Gas box enclosure
Gas box rails
Chamber support rails
Low frequency generator
High frequency generators
MFA / filter
Watlow heater contoller
Vapor line - heat trace
Foreline heater controller
2002 vintage.
AMAT / APPLIED MATERIALS Producer III is a highly versatile reactor capable of operating at extreme temperatures and pressures, making it ideal for increasingly sophisticated research. The reactor makes use of flexible quartz sealing, ensuring consistent and reliable operation. It has an integrated vacuum system, enabling it to rapidly adjust from ultra-high vacuum to a high vacuum while maintaining a high level of vacuum integrity. The Advanced Materials AMAT Producer III boasts an impressive range of features designed to enable a variety of innovative experiments. The reactor is capable of producing precise temperatures ranging from -90°C to 1150°C and utilizes a unique gas-mixing system to allow for the creation of complex reaction environments. Additionally, a built-in mass flow controller allows for accurate, repeatable flow rates. APPLIED MATERIALS Producer III can be outfitted for a range of experiments, including synthesis, etching, crystallization, sensitization, irradiation or deposition. With a reaction chamber size of up to over 40 liters, the reactor can achieve rapid low temperature purification, rapid synthesis and, with the addition of a diffusion pump, increased vacuum. Producer III also integrates with other tools to allow for multistep experiments. External gas lines can be connected to the splitter for multiple gas control systems, and sample holders can be added for multiple sample runs. The reactor is further enhanced by the ability to add an optical pyrometer for precise temperature control and feedback. The producer's robust design includes an integrated safety system and thermal limiters, ensuring reliable operation under normal and extreme conditions. And with additional features such as a multipoint temperature controller and a removable window, the reactor provides maximum versatility for the researcher. Overall, AMAT / APPLIED MATERIALS Producer III is an advanced reactor capable of providing a reliable, low-temperature working environment, giving scientists the freedom to explore a broad range of processes. Its wide range of features and ability to be tailored to a specific experiment make it an invaluable tool for modern researchers.
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