Used AMAT / APPLIED MATERIALS Producer III #9070340 for sale

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AMAT / APPLIED MATERIALS Producer III
Sold
ID: 9070340
Wafer Size: 12"
Vintage: 2002
BPSG System, 12" (3) Chambers Shrink Cassette 2002 vintage.
A AMAT / APPLIED MATERIALS Producer III reactor is a type of chemical vapor deposition (CVD) system designed for use in semiconductor, and other device, fabrication. It is ideal for producing thin-film deposition layers on a substrate using various organic, metallic, and ceramic precursors. AMAT Producer III is designed with a vertical lift susceptor platform, allowing for multiple process configurations and substrates up to 200 mm. Substrate heating is achieved with a powerful rapid-start heater. The reactor is engineered with a base pressure of 1x10-6 Torr and is capable of achieving high-pressure up to 5 Torr for optimal growth rate. A built-in, digital microwave energy source is also included. This dual-frequency source can generate flexible power settings that allow for precise dopant control, greater surface area coverage, and improved crystal quality in the resulting film. The digital source is designed to reduce susceptibility of feed-through connections and enable high-efficiency film growth. To ensure uniform deposition rates and film thickness, APPLIED MATERIALS Producer III is also designed with a dual-frequency pulse source that is capable of supplying a 45 MHz signal and a 270 kHz plasma source for optimal homogeneity. In terms of process automation, Producer III contains an Event Control System (ECS) with dedicated software, allowing users to design and integrate an automated process sequence. The ECS monitors temperatures, pressures, and isolation levels, and offers control and logging features, including recipe execution, step-by-step process control, and recipe storage. AMAT / APPLIED MATERIALS Producer III also contains a tilting reactor for safe wafer loading and unloading. The almorail CAE in the reactor platform makes for convenient sample transfer and is adjustable to fit varying substrate sizes. To ensure maximum safety, AMAT Producer III is also equipped with a variety of in-system safeguards. These include pressure sensing, exhaust, and choke valves, motor drive systems, and nitrogen and argon Purge systems. These systems are designed to maintain optimal working conditions and protect both operators and the surrounding environment.
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