Used AMAT / APPLIED MATERIALS Producer S #177862 for sale
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ID: 177862
System, SABPSG
Front End: Manual FE
Buffer pump: IPX100
Wafer sensor: WPS
Chamber position: A, B, C
Chambers A, B, C:
Lift assembly Installed
Pressure gauge Installed
RFG AE RFG-2000
RPS MKS FI20620
P-kit Installed
Ozone rack: Yes
Gas panel
SLD: Yes
MFC UNIT 8161/8160
Transducer MKS w/o display
Line L3 Empty
Line L2 Empty
Line L1 Empty
Line 1 O3
Line 2 O2 20 slm
Line 3 N2
Line 4 NF3 10 slm
Line 5 N2 5 slm
Line 6 Ar 20 slm
Line 7 Empty
Line 8 He 20 slm
Line 9 N2 20 slm
Line 10 N2 purge
Line R1 Empty
Line R2 Empty
Line R3 Empty
PLIS:
TEOS Yes
TEPO x (line ready)
TEB x (line ready)
Liquid line Yes
2002 vintage.
AMAT / APPLIED MATERIALS Producer S is a high-throughput modular single wafer tool used for chemical vapor deposition (CVD) and atomic layer deposition (ALD) thin film processes. The tool has a compact design, allowing it to fit easily in smaller manufacturing spaces. It also has a wide temperature range, allowing it to adapt to any production needs. AMAT PRODUCERS is designed with high-level safety and pollution reduction measures. It has a built-in closed loop control equipment that automatically adjusts production levels, process parameters, and temperature to prevent overruns and keep production consistent. The automated control system also reduces the potential for operator errors during production. APPLIED MATERIALS PRODUCER-S operates on a two-chamber process chamber configuration. The first process chamber is designed to handle different types of materials, while the second process chamber is used to clean the substrate before thin film deposition. Both chambers can be heated simultaneously, allowing for faster production. AMAT Producer S is outfitted with an advanced automation unit, allowing for precise control of every aspect of the production process. The tool can be operated through both manual and automated modes. It is also equipped with a state-of-the-art motion control machine, which can control the movement of the substrate holder and the nozzle of the CVD/ALD source material injector. AMAT / APPLIED MATERIALS PRODUCER-S offers a variety of features that help to reduce costs and improve manufacturing. It features a robotic arm for substrate loading and unloading and a software tool for scheduling and optimization. The robot arm helps to reduce the potential for errors caused by human error, while the software asset helps to reduce downtime. PRODUCER-S is a reliable and efficient tool for producing thin film coatings. With its advanced automation model and safety measures, it provides a cost-effective solution for thin film deposition needs.
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