Used AMAT / APPLIED MATERIALS Producer S #9013303 for sale
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ID: 9013303
Wafer Size: 8"
TEOS PECVD system, 8"
System Overview:
Technology DCVD
Platform Type PRODUCER SE
Wafer Size 200MM (8 INCH)
Wafer Shape SNNF
Position A (XY) PE TEOS TWIN
Position B (XY) PE TEOS TWIN
Position C (XY) PE TEOS TWIN
Position A Process (09) TEOS
Position B Process TEOS
Position C Process TEOS
System Software:
System software Latest qualified version V3.4_12
GP Latest qualified version P 133
Factory Interface System 5.4 FI, Options:
Number of Loadports Number of Loadports 2
Metrology Unit Nano Nanometrics
Light Towers 4 COLOR CONFIGURABLE LIGHT TOWER YES
MainFrame Options:
Rear MF Light Tower RAGB No NO
Remote Options, System Monitors:
First Local Monitor STAND ALONE, 15 Inch
Second Local Monitor TTW WITH KEYBOARD, 15 inch
Remote Options, Heat Exchanger:
System Heat Exchanger Qty ONE Steelhead 1
AMAT HX Hoses and Manifolds NO YES
Pumps:
Transfer chamber Customer supply, MUST meet GT SSPS Specifications!
Chamber A Roughing pump Customer supply, MUST meet GT SSPS Specifications!
Chamber B Roughing pump Customer supply, MUST meet GT SSPS Specifications!
Chamber C Roughing pump Customer supply, MUST meet GT SSPS Specifications!
Customer Fab Options:
System Power Mainframe 208V 300A 208V 3 Phase, 4 Wire 300A
Customer EMO Interface 24V AC
ChA-B-C, (XY) PE TEOS TWIN:
(2) Robot Blades Aluminum
RF Generator 1
RF Generator 2
(2) Heater HA-12 TIGHT RF MESH WITH CLAMP TYPE 2
(2) Rf Filter Rev ? RF filter
Foreline TV 2 1/2-inch heated throttle valve
Foreline ISO 2 1/2-inch heated ISO valve
RPS Astron EX RPS
ChA, (XY) PE TEOS TWIN, Gas Box Options:
Gas Pallet Type TEOS ONLY
ChA-B-C, (XY) PE TEOS TWIN, Gas Box Configuration, Gas Section:
Line 1 Empty
Line 2 Empty
Line 3 O2- 5SLM
Line 4 N2 Purge
Line 5 Ar- 5SLM
Line 6 NF3- 3SLM
Line 7 Empty
Line 8 Empty
Line 9 He- 5SLM
Line 10 Liquid Purge
Line 11 Empty
Line 12 Empty
Line 13 Empty
Line 14 Liquid Pos 1 TEOS- 4.0 g/min
ChA, (XY) PE TEOS TWIN, Process Abatement:
Abatement TCS
ChA, (XY) PE TEOS TWIN, Process Kit, TEOS:
(2) Gas Box Gas Box - Bypass 0040-53927
(2) Blocker UHD Blocker,200mm Producer 0021-09914
(2) Faceplate,TEOS Faceplate,200mm Producer 0021-01813
2000 vintage.
AMAT / APPLIED MATERIALS Producer S is an advanced reactor that is renowned for its efficacy and performance. It is used to deposit a variety of materials on substrates to create various products. It typically functions as a PECVD (plasma-enhanced chemical vapor deposition) reactor and is one of the most widely used tools in the semiconductor industry. AMAT PRODUCERS utilizes a unique design that evenly distributes plasma to the deposition chamber, resulting in high-quality and uniform coatings. It makes use of an advanced turbulent flow equipment to produce optimum process uniformity and repeatability. The design ensures that every production step is optimized for the production of micro components and integrated circuit devices. The system comes equipped with various advanced features that maximize efficiency and reduce the amount of time required to complete a cycle. This includes a dual-chamber design that automatically switches between your desired process so that the reactor runs faster and with fewer interruptions. Additionally, the automated shuttering unit helps maintain uniform process conditions throughout the machine. APPLIED MATERIALS PRODUCER-S is designed for precision and unparalleled accuracy. It provides users with the tools necessary to validate and confirm optimal process conditions. This is achieved through a variety of diagnostics that can be monitored in real-time. All relevant parameters can be monitored throughout the production process, allowing operators to quickly intervene if a process is going awry. The reactor is also designed to be easily maintained. Its advanced features ensure its longevity and performance. Along with these innovative features, the tool also offers several safety features to provide its operators with peace of mind. Once all safety guidelines are followed, users can take advantage of the asset's robust design and be assured that they can run multiple processes without any problems. PRODUCER-S is an incredibly advanced and reliable reactor that offers unparalleled versatility and performance. With its efficient design and advanced features, APPLIED MATERIALS Producer S is an excellent choice for anyone looking to produce high-quality products with absolute accuracy.
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