Used AMAT / APPLIED MATERIALS Producer S #9291526 for sale
URL successfully copied!
Tap to zoom
ID: 9291526
Vintage: 2005
CVD System, 8"
(2) PECVD SiN
PECVD TEOS
(3) Twin chambers
Wafer shape: SNNF
No SMIF interface
Chamber:
A twin:
PE OX
SIN
ARC
APF
B twin:
PE OX
TEOS
SIN
ARC
C twin:
PE OX
SIN
ARC
APF
Chamber A:
Single frequency
Manometer: 10/100 Torr
Clean type (RPC): ASTEX
No DPA
Chamber B:
Single frequency
Manometer: 10/100 Torr
Clean type (RPC): ASTEX
No DPA
Chamber C:
Single frequency
Manometer: 10/100 Torr
Clean type (RPC): ASTEX
No DPA
System monitors: Through the wall
Mainframe
Mainframe type: Shrinkage
Robot type: Dual VHP
Load cassette: Manual (2) cassettes
No SMIF
VME Racks:
SBC
VGA
MEI1
MEI2
I/O Expan
Monitor
Floppy Disk Drive (FDD)
No Hard Disk Drive (HDD)
Gas delivery:
MFC Type: AERA D980 / BROOKS 6256S
FUJIKIN 5 Ra Max valves
Transducer: MKS With display
Regulators: PARKER
Single Line Drop (SLD)
SLD Gas line feeds: Top feed
Gas pallet:
Chamber A:
Make / Model / Size / Gas
BROOKS / 6256s / 2 SLPM / O2
AERA / FC-D980C / 1 SLM / SiF4
BROOKS / 6256s / 10 SLPM / N2O
BROOKS / 6256s / 400 SCCM / NH3
BROOKS / 6256s / 10 SLPM / N2
BROOKS / 6256s / 500 SCCM / SH4
BROOKS / 6256s / 2 SLPM / (CH3)3SiH
BROOKS / 6256s / 3 SLPM / He
BROOKS / 6256s / 3 SLPM / NF3
BROOKS / 6256s / 5 SLPM / Ar
Chamber B:
AERA / FC-D981C / 20 SLM / N2O
BROOKS / 6256s / 500 SCCM / N2O
BROOKS / 6256s / 5 SLPM / O2
BROOKS / 6256s / 200 SCCM / SIF4
MYKROLIS / FC-2902MEP-T / 500 SCCM / SH4
BROOKS / 6256s / 10 SLPM / N2
BROOKS / 6256s / 5 SLPM / He
AERA / FC-D981C / 400 SCCM / NH3
BROOKS / 6256s / 3 SLPM / NF3
BROOKS / 6256s / 5 SLPM / Ar
HORIBA / 4 g/min / TEOS
Chamber C:
BROOKS / 6256s / 2 SLPM / O2
BROOKS / 6256s / 200 SCCM / SiF4
AERA / FC-D980C / 20SLM / N2O
BROOKS / 6256s / 400 SCCM / NH3
BROOKS / 6256s / 10 SLPM / N2
BROOKS / 6256s / 500 SCCM / SH4
BROOKS / 6256s / 2 SLPM / (CH3)3SiH
BROOKS / 6256s / 3 SLPM / He
BROOKS / 6256s / 2 SLPM / NF3
BROOKS / 6256s / 5 SLPM / Ar
Electrical requirements:
Line frequency: 50/60 Hz
Line voltage: 200/208 V
Line amperage: 240 A
2005 vintage.
AMAT / APPLIED MATERIALS Producer S is an advanced process chamber equipment used in the manufacture of integrated circuits and other semiconductor components. It is a high-temperature chemical vapor deposition (CVD) reactor which allows the production of high volumes of built-in electronics. AMAT PRODUCERS is a multi-functional system suitable for a range of post-processing applications, including CVD, atomic layer deposition (ALD), and physical vapor deposition (PVD). APPLIED MATERIALS PRODUCER-S has a symmetrical ceramic chamber design which creates an ideal environment for the deposition of polymers, oxides, and metals. It can be operated in temperatures up to 1000°C in a nitrogen or oxygen environment and the chamber is designed for uniform film thickness and heat control. The chamber also has an integrated microwave plasma source designed to preserve the quality and consistency of the films being deposited. AMAT Producer S is equipped with a robotized end-effector unit and a collection of gas controls which can be precisely dialed in for desired processes. The multiple in-situ diagnostic capabilities, including an optical emission spectrometer (OES), analyze material deposition and optimize film performance in various processes. An additional option of an angled substrate heater is available to facilitate films with greater uniformity. All of the components are housed in a single enclosure and can be accessed through its modular design, allowing for fast and efficient maintenance. The machine is also equipped with intuitive software and user-friendly features. It facilitates access to real-time process data, predictive modeling, and process optimization capabilities. Operating parameters can be quickly modified and adjusted in order to achieve desired results. The integrated software also allows for remote access, providing increased flexibility and monitoring capabilities. AMAT / APPLIED MATERIALS PRODUCER-S is a robust and highly-capable CVD tool, offering superior quality and high throughput for a range of post-processing applications. Its symmetrical ceramic chamber design enables uniform deposition of polymers, oxides, and metals, providing a controlled environment for the high-temperature chemical vapor deposition process. The improved gas mixing capabilities and multiple in-situ diagnostics ensure material deposition is consistent and of good quality, helping to minimize scrap losses. Its modular design and intuitive software also offer real-time monitoring, making it an ideal choice for integrated circuit manufacturing.
There are no reviews yet