Used AMAT / APPLIED MATERIALS Producer SE #9017194 for sale
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ID: 9017194
Vintage: 2001
SACVD BPSG system, 8"
System overview:
Technology: DCVD
Wafer shape: SNNF
Position A: (XY) BPSG TWIN
Position B: (XY) BPSG TWIN
Position C: (XY) BPSG TWIN
System software: 3.4_8
NT version: P 133
Factory interface system 5.4 FI, options:
Number of load ports: 2
Metrology unit: Nanometrics
Light tower: 4-color configurable light tower
Remote options, system monitors:
First local monitor: standalone 15"
Second local monitor: TTW with keyboard, 15"
Remote options, heat exchanger:
System heat exchanger: Steelhead
AMAT HX hoses and manifolds: AMAT stainless hose upgrade: yes
Pumps:
Transfer chamber: BOC Edwards IPX-100L
Chamber A roughing pump: BOC Edwards iH-1000
Chamber B roughing pump: BOC Edwards iH-1000
Chamber C roughing pump: BOC Edwards iH-1000
System power mainframe: 208 V, 3 phase, 4 wire, 300 A
EMO interface: 24 VAC
Ch A-B-C, (XY) BPSG TWIN:
Robot blades: aluminum, (2) 0040-43516
Heater: HA-12 tight RF mesh with non RF cap, (2) 0190-03516
Foreline TV: 2.5" heated throttle valve, 0010-38429
Foreline ISO: valve, ISO 200 mm SACVD PROD-REP.16 holes, 0010-01653
RPS: Astron EX RPS, 0920-00057
Ch A, (XY) BPSG TWIN, gas box options:
Gas pallet type: BPSG only
Line 1: O3
Line 2: O2- 20SLM
Line 3: N2 Purge
Line 4: NF3- 3SLM
Line 5: Empty
Line 6: Ar- 5SLM
Line 7: He- 20SLM
Line 8: He- 20SLM
Line 9: He- 20SLM
Line 10: Liquid N2 purge
Line 11: Empty
Line 12: Empty
Line 13: Empty
Line 14: Liquid Pos 1, Teb- .5 g/min
Line 15: Liquid Pos 2, TEOS- 4.0 g/min
Line 16: Liquid Pos 3, Tepo- .25 g/min
Ch A-B-C, (XY) BPSG TWIN, process abatement: TCS
Ch A-B-C, (XY) BPSG TWIN, process kit:
Gas box: gas box - bypass, (2) 0040-53927
Blocker UHD: blocker, 200 mm producer, (2) 0021-09914
Faceplate BPSG: faceplate, 200 mm producer, (2) 0021-03568
Top pumping liner: pumping liner top producer, (2) 0020-00402
Liner, ceramic middle: liner, ceramic middle, producer, (2) 0020-00316
Liner, ceramic bottom: liner, ceramic bottom, producer, (2) 0020-00317
Liner, ring insert: liner, ring insert, producer, (2) 0021-06569
Lift pin-TC: lift pin 170 fixed floating 200 mm producer, (8) 0200-03314
Lift ring: lift ring 120 fixed floating 200 mm producer, (2) 0200-02576
Hoop: hoop 140 fixed floating 200 mm producer, (2) 0200-02577
2001 vintage.
AMAT / APPLIED MATERIALS Producer SE is a highly advanced reactor that has been designed for the production of advanced materials and novel devices. This reactor has been designed to meet the most stringent requirements, providing the highest possible yields for the production of advanced materials and novel devices. AMAT Producer SE brings together a unique combination of customizable semiconductor technology, materials science, and processing expertise to deliver the highest yields for advanced materials and devices. It is designed for the highest level of automation and scalability to ensure process fidelity regardless of the customer's volume or complexity. The flexible architecture of this reactor allows for precise control over the flow of reactants and is capable of processing a wide variety of reactants. This reactor also features a sophisticated control system, ensuring repeatable and predictable reactions and results. The control system is able to adjust reaction parameters to fine tune processes and results to optimize yields. The reactor's advanced design comprises a comprehensive suite of process chambers, each equipped with heating, cooling, and pressure control systems. This allows for precise control over reaction temperatures, reaction times, and pressure profiles. In addition, high velocity gas delivery is possible. The material process system of this reactor also includes a set of materials analysis systems, such as SEM/EDS, TEM, FTIR, GCMS, and XRD. These systems allow for rapid characterization of material sections prior to and post processing. This means that materials can be quickly sampled and analyzed for precise process optimization. APPLIED MATERIALS Producer SE has been designed to meet the needs of manufacturers of advanced materials and devices, enabling high volume, high yield production and increasing productivity. It is the ideal solution for translating laboratory technology and experiments into production lines.
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