Used AMAT / APPLIED MATERIALS Producer SE #9088227 for sale
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ID: 9088227
CVD System, 12"
(1) EFEM
(1) Main: Process chamber, transfer module
(1) AC rack: main power box
(1) O3 rack: O3 generator rack
UI panel: front UI monitor
(2) Chuck heaters: Harp USG vacuum heaters
2006 vintage.
AMAT / APPLIED MATERIALS Producer SE is a high throughput advanced reactor system, engineered to deliver a precise combination of high uniformity and very high throughput for advanced process material deposition. The integrated dual chamber architecture enables two independent systems to be operated concurrently, providing an engineering solution for process flexibility and superior productivity when users want to process the same wafer type/sizes. AMAT Producer SE features a large uniform chamber equipped with an innovating gas-injection delivery system, providing highly uniform and reproducible plasma processes. The large chamber design allows for precise material-deposition uniformity with many process options, such as vapor-phase, liquid-phase, chemical-vapor-deposition, and atomic-layer-deposition processes. The independent process modules, AdvancedSource and HiCap, enable the optimization of MPCVD processes and improved film quality due to Low-Current Flash Thermal Spark Exciter (LFSE). The Low-Current Flash Thermal Spark Exciter further improves process control and precision by controlling the radio frequency (RF) power into the chamber, ensuring that it is maintained at the desired level with extremely tight accuracy. The LFSE also provides a control circuitry that eliminates arcing caused by sharp edges on the process chamber. Other features include a powerful segmented chuck, a separate manipulator, and a separation chamber, enabling users to perform multi-step processes without any mixing of chamber gases or crossing of residues from one process to the next. APPLIED MATERIALS Producer SE comes equipped with an intuitive software interface that allows users to customize, control, and monitor each process. Users can control, monitor, and store the process-parameter profiles, thus assuring consistent process performance across different lots. The software also includes a powerful File-Management system, allowing users to save and easily recall profiles for repeatable application results. Producer SE features excellent cost of ownership, with high throughput, enhanced compatibility with substrates and excellent uniformity across the entire wafer area. The reactor also offers excellent reproducibility, with consistent results over successive runs. AMAT / APPLIED MATERIALS Producer SE offers users ultimate flexibility in materials deposition, with the flexibility to perform a range of process technologies.
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