Used AMAT / APPLIED MATERIALS Producer SE #9120403 for sale

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ID: 9120403
Wafer Size: 12"
PECVD Silane system, 12".
AMAT / APPLIED MATERIALS Producer SE is a reactor designed for use in a variety of fabrication processes. It is a large, high-temperature vacuum chamber that can accommodate a variety of materials. The reactor is capable of processing a wide array of materials including silicon, gallium arsenide, gallium nitride, and gallium phosphide. It is equipped with three independently controlled vacuum chambers that can be used for sample loading, sample transfer and deposition/etch process. The equipment is also capable of producing a variety of passivation and dielectric layers. The reactor utilizes a graphite susceptor to support the samples during the processing. It also has two concentric quartz seal rings for a better vacuum seal. In addition, the system includes a gas delivery unit that is used for purging or introducing gasses into the reactor. AMAT Producer SE utilizes a direct current (DC) high frequency sputtering method to deposit onto the surface of the sample. This process is highly effective at producing Ultra-Shallow Junctions (USJ) and other fine features. The sputtering process also enables the machine to deliver a high deposition rate, high uniformity and high process stability. The tool is also designed with a temperature control asset to ensure that the temperature of the sample remains consistent throughout the process. The temperature range of the model is from 30 to 500°C. The equipment also includes a pressure control system that is used to maintain a consistent pressure in the reactor environment. APPLIED MATERIALS Producer SE supports a variety of materials and deposition process including oxidation, nitridation, silicidation, diffusion and etching. The reactor is also equipped with process monitoring and control systems for accurate and consistent results. The unit includes an online data acquisition and data processing machine. This tool can monitor the process parameters and the sample conditions throughout the processing. Overall, Producer SE is a highly versatile and reliable deposition/etching reactor that is well suited for a variety of fabrication processes. It has a high deposition rate, high uniformity, high process stability and excellent temperature control. It also has an advanced monitoring and control asset to ensure consistent results.
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