Used AMAT / APPLIED MATERIALS Producer SE #9150542 for sale
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ID: 9150542
Wafer Size: 12"
Vintage: 2003
CVD System, 12"
Process: BPSG
2003 vintage.
AMAT / APPLIED MATERIALS Producer SE is a single-wafer, batch-load reactor, designed for epitaxy of high-purity semiconductor materials. It is suited for production of thin-film sources and devices requiring a wide range of deposition temps with excellent uniformity and minimal contamination. The SE package utilizes of a highly efficient wafer-heating element coupled with an advanced gas delivery system to produce quality deposition results in a cost effective process. AMAT Producer SE innovations include a heated wafer chuck that delivers uniform heating across the entire wafer for improved uniformity and throttle-down capability for improved process control. The ability to oeprate both in batch and continuous mode adds increased flexibility to the production process. The advanced multizone heating and gas flow distribution system ensures a consistent production within a closed process environment. APPLIED MATERIALS Producer SE also utilizes with superior material throughput and productivity. The high-throughput delivery components, coupled with an intelligent wafer-level process monitoring system, ensure a process that is free of contamination characterized by rapid cycle times and excellent uniformity. The reactor is designed for a wide range of materials and applications. A choice of up to three standard substrate boat sizes are offered, and a variety of gas delivery systems allows for a number of deposition recipes. In addition, the reactor is self-cleaning and comes with a high-resolution pyrometer designed to accurately monitor wafer temperature during deposition. Producer SE is an ideal production solution for a variety of high-performance semiconductor products. With its efficient design and versatile operations, the reactor offers an outstanding value proposition to any semiconductor producer requiring high-qulality deposition processes.
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