Used AMAT / APPLIED MATERIALS Producer SE #9153559 for sale
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ID: 9153559
Wafer Size: 12"
Vintage: 2007
CVD System, 12"
(2) Chambers
Chamber A and B:
Chamber process: XJ (PE Si-lane twin)
APEX 3000 RF Generator
Gas delivery:
Gas pallet type: Surface mount vertical
No regulated gas panel
No regulated TMS
Top gas feed
Gas panel cabinet exhaust: Top
No facilities interlock indicator
SETRA Transducers
Nippon filter
Manual and pneumatic valves: Hamlet
No liquid source
Gases:
Chamber A:
Gas position / Gas / MFC Size
Gas 1 / C3H6 / 3000 SCCM
Gas 2 / H2 / 15000 SCCM
Gas 8 / O2 / 30000 SCCM
Gas 9 / AR / 15000 SCCM
Gas 10 / HE / 5000 SCCM
Gas 13 / N2 / 15000 SCCM
No regulator
No transducer
Chamber B:
Gas position / Gas / MFC Size
Gas 1 / C3H6 / 3000 SCCM
Gas 2 / H2 / 1000 SCCM
Gas 8 / O2 / 30000 SCCM
Gas 9 / AR / 15000 SCCM
Gas 10 / HE / 5000 SCCM
Gas 13 / N2 / 15000 SCCM
No regulator
No transducer
Mainframe:
No local center finder
No Cu wafer sensor
Third MF IO motion card
Robot blade: Standard VHP
Factory interface, 12":
Options: 5.3
WIP Delivery type: OHT
Wafer pass thru and storage: DSM Specific cooling tray
KAWASAKI Track robot with edge grip
No docked E99 reading capability
Load port types: Enhanced 25 wafer FOUP
Load port operator interface: Standard 9 light
No configurable color lights
No docking flange shield
Front facing intake plenum air system
E84 Pl/O Sensors and cables: Upper E84 sensors and cables
OHT Light curtain
Carrier ID host interface
(3) Colors configurable light towers
Heat exchanger:
No AMAT / APPLIED MATERIALS HX Hose and manifolds
Remote AC:
Facilities UPS interface
Chamber configuration:
Channel A / Channel B:
BFC
Foreline, 2"
T/V Type: 683B
0090-05813 RF Filter
RPS
FFU Controller
Power supply: 200-208 VAC, 60 Hz
2007 vintage.
AMAT / APPLIED MATERIALS Producer SE is a single wafer planetary reactor designed and manufactured by AMAT, a leading global supplier of advanced semiconductor equipment. This reactor combines advanced features with easy-to-use software to produce uniform, precise, and reliable results in the production of advanced semiconductor materials for high performance, low power, and reliability applications. The single-wafer Advanced Materials AMAT Producer SE is ideal for process engineers and scientists, and is capable of providing high-yield, high-quality results for a wide range of thin film processes and substrates. The reactor provides accurate and repeatable wafer production with process uniformity, reliability, and wafer shape consistency. The reactor is equipped with a process chamber that is sealed for ultra-high vacuum (UHV) and near-vacuum (NV) processes. The equipment is designed to achieve processes on both single- and multiple-wafer substrates and to process multiple gases simultaneously. The reactor is also equipped with a low-emissivity deposition view window that gives users a direct view when depositing materials, as well as a refrigerator system that maintains cool process gases at a constant temperature. For control and service, APPLIED MATERIALS Producer SE is supported by a suite of Easy-to-Use software developed by APPLIED MATERIALS. This suite provides intuitive interface for training, maintenance, monitoring, and service. Additionally, the producer's software platform allows for customization to address individual unit and deposition needs. Producer SE offers a number of features designed to maximize production and increase productivity levels. It is equipped with automatic wafer centering vehicle and robotics systems that keep substrates in place and minimize yield loss. Additionally, the advanced digital processing control machine maintains optimum process speed and positional accuracy, as well as provides continuous feedback on the status of the wafer. The single-wafer Advanced Materials AMAT / APPLIED MATERIALS Producer SE allows for fast and easy process execution and control, and is designed to help ensure the highest yield and quality possible. It is a reliable and cost-effective choice for semiconductor manufacturers looking to optimize their production and achieve the best results.
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