Used AMAT / APPLIED MATERIALS Producer SE #9204012 for sale
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ID: 9204012
Wafer Size: 12"
Vintage: 2002
Twin chamber, 12"
Process: HT SiN
Major part:
RPS: MKS FI80131(Astron ex)
Ceramic heater: AIN
Gas panel: 1-1/8 C-Seal surface mount
AC Box: 0195-02428
Heater lift driver: 1080-00126
Pin lift driver: 0190-13840
Throttle valve: 683B-24562
ISO Valve: SMC XZ-218
Manometer: 10T / 100T
HF RF Generator:
0920-00085
0920-00107
Process kits:
Top liner
Middle liner
Bottom liner
Pumping Ring
Spacer
Lift hoop
EQ Liner
Liner
Nitch
Gas panel configuration:
Gas Size MFC Filter Valve
Stick 3 N20 15,000 UFC-8565 PALL Hamlet
Stick 4 N20 1,000 IFC-125 PALL Hamlet
Stick 5 N2 Purge NA NA Hamlet
Stick 6 SiH4 1,000 UFC-8565 PALL Hamlet
Stick 7 NH3 700 IFC-125 PALL Hamlet
Stick 8 HE 15,000 UFC-8565 PALL Hamlet
Stick 9 N2 25,000 UFC-8565C PALL Hamlet
Stick 10 NH3 5,000 UFC-8565 PALL Hamlet
Stick 11 N2 5,000 UFC-8565 PALL Hamlet
Stick 12 N2 Purge NA NA Hamlet
Stick 13 NF3 5,000 UFC-8565C PALL Hamlet
Stick 14 AR 10,000 UFC-8565 PALL Hamlet
Stick 15 N2 5,000 UFC-8565C PALL Hamlet
Junction box missing
2002 vintage.
AMAT / APPLIED MATERIALS Producer SE is an advanced reactor platform for silicon wafer production. It is the industry's first 300mm-diameter single-wafer processing system that creates the highest quality integrated circuits for the electronics industry. AMAT Producer SE processes semiconductor wafers with the highest yield rate available in the industry. APPLIED MATERIALS Producer SE's state-of-the-art technology is designed to improve overall wafer processing and yield. The reactor includes two components to ensure maximum performance and flexibility: the cluster tool and the process module. The cluster tool is one of the main components of the reactor and is responsible for the production of advanced processes in a single-wafer environment. This tool works to maximize production flexibility, efficiency and cost savings. The cluster tool includes advanced features such as a low-temperature process module, multiple process chambers, a high-speed isolation mechanism and a selective delivery system. It also utilizes AMAT proprietary process recipes to ensure optimal fabrication performance. The second component of Producer SE, the process module, is designed to optimize processing in a single-wafer environment. Utilizing APPLIED MATERIALS proprietary technology, it supports a variety of advanced processes, such as atomic layer deposition, ion implantation, ion milling and etching. It also works to increase throughput, yield and integration density. AMAT / APPLIED MATERIALS Producer SE is equipped to handle a wide range of semiconductor wafers, from 50nm to 10 micron. It has been designed to handle the most advanced process technologies, making it an ideal solution for those looking to fabricate complex semiconductor devices for leading-edge markets. AMAT Producer SE is a powerful and reliable reactor platform for silicon wafer production, offering the highest yield rates in the business.
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