Used AMAT / APPLIED MATERIALS Producer SE #9229583 for sale
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ID: 9229583
Wafer Size: 12"
Vintage: 2006
CVD System, 12"
UV Cure & SiN
FI: 5.3
FI Robot: KAWASAKI
Chamber A: Nano cure (UV Cure)
Chamber B: BD (Black diamond)
Chamber C: Blok (Barrier low-k)
Gas: IGS Type
Chamber A:
Gas / Model / Flow
Ar / UFC-8565 / 30slm
He / UFC-8565 / 30slm
Chamber B:
Gas / Model / Flow
O2 / UFC-8565 / 2slm
O2 / UFC-8565 / 500sccm
He / UFC-8565 / 5slm
TMS / UFC-8565 / 750cc
He / UFC-8565 / 5SLM
He / UFC-8565 / 12slm
NF3 / UFC-8565 / 3slm
Ar / UFC-8565 / 3slm
He / UFC-8565 / 5slm
He / UFC-8565 / 10slm
Chamber C:
Gas / Model / Flow
O2 / UFC-8565 / 3slm
O2 / UFC-8565 / 500sccm
He / UFC-8565 / 5slm
O2 / UFC-8565 / 10slm
He / UFC-8565 / 12slm
NF3 / UFC-8565 / 3slm
Ar / UFC-8565 / 3slm
He / UFC-8565 / 5slm
He / UFC-8565 / 5slm
UV Power supply rack: ASTEX Generator
Missing parts:
Vacuum EV
PC
Flex controller unit
Chamber B & C:
Heater power filter
Chamber IO Controller unit
Lid assy
MF Motion controller CPU board
LFC:
(2) mDEOS
(2) ATRT
2006 vintage.
AMAT / APPLIED MATERIALS Producer SE is a state-of-the-art product, among the highest quality reactors available in the market today. This single-wafer, automated platform offers an efficient, cost-effective solution for semiconductor device fabrication. It can create a wide variety of materials, including silicon, germanium, arsenic, and gallium arsenide, with superior process control and high reproducibility. AMAT Producer SE's design offers outstanding temperature control and uniformity throughout the chamber. Built with a unique air-thermal system, APPLIED MATERIALS Producer SE further ensures accurate and consistent temperatures. This enables impressive precise and repeatable results, as well as gives less sensitivity in handling of wafer substrates. It is also capable of producing multiple-layers simultaneously, aiding lead times and improved quality. In addition, a top of the line embedded PC and intuitive software are at the core of Producer SE's system. Its software provides user friendly commands and access to additional operations. The software is designed to help engineering teams create and repeat processes easily and efficiently, as well as optimize processes for improved yields. This also offers the integrated recipe management for optimized use of the SE's over 10,000 recipes. As for safety, AMAT / APPLIED MATERIALS Producer SE is equipped with various safety features, including over-temperature and pressure protection, as well as borosilicate viewport. The borosilicate window allows for full view of the process, enabling real time monitoring of recipes. AMAT Producer SE also features a daily maintenance program to ensure consistent operation. All in all, APPLIED MATERIALS Producer SE is an exceptional, broadly accepted, and user-friendly reactor. A powerful combination of robust design, safety features, and user-friendly software makes it a reliable choice for high-quality materials production. It also offers cost-savings by supporting high throughput, efficient production, and advanced process optimization.
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