Used AMAT / APPLIED MATERIALS Producer SE #9239732 for sale
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ID: 9239732
Wafer Size: 12"
Vintage: 2007
CVD System, 12"
Process: ACL
Sub process: HT ACL
SMIF / FOUP
(2) Twin chambers
Chemical: C3H6, NF3
AC Rack
EFEM
Rear monitor
Monitor rack
FFU Panel
Signal cable box
Load module:
(2) Load ports TDK E4
BROOKS MAC8 Loader arm
ALCATEL A100L Dry pump
Transfer module (Platform):
Transfer arm (Robot) BROOKS MAG8
ALCATEL A100L Dry pump
Process module:
(2) Chambers
(2) ALCATEL ADS 1202H Pumps
(2) NPP NPR-S10L RF Generators
(2) Gas boxes
(3) IBM X306 PC
Utility:
Distribution panel
ETC
Gases: CH36, NF3, N2, AR, HE
Operating system: Windows
2007 vintage.
AMAT/AMAT / APPLIED MATERIALS Producer SE (substrate electrode) is a semiconductor manufacturing tool designed to apply an electrically conductive material on the surface of a substrate. It utilizes electrochemical deposition - the electrolytic capability of a liquid to deposit solid material on a substrate - to achieve the consistent, reliable, and highly repeatable deposition of uniform, precise layers of conductive material. AMAT Producer SE has a cleanroom-grade chamber that provides a consistent environment for the deposition process. A target electrode (anode) is located directly above the substrate holder (cathode) in a contained area filled with electrolyte solution, and a high current is driven through the solution to enable electrochemical deposition of the desired material. APPLIED MATERIALS Producer SE protects the liquid electrolyte from contamination and evaporation with its batch operation. It also is well-suited for automated operation and integration with an assembly line. For uniform uniformity, the chamber utilizes agitation features and a stirring paddle to promote a uniform distribution of material on the target substrate. The cycle time for each process is highly dependable, so that the operator is not required to calculate or adjust variables during the deposition cycle. The applied material's properties are also very reproducible, and the applicator's sharp geometric control allows for the creation of thin, tightly shaped features. The tools also have a resolution and accuracy of microns. APPLIED MATERIALS/Producer SE provides a robust high-end Electrochemical Deposition (ECD) system with many features, from rapid cycle times and temperature control ability to the use of additional inert gases for improved processing capabilities. In addition, the tool is an effective way to achieve high-quality, repeatable, and reproducible results with a wide range of materials such as copper, gold, aluminum, and various other metal oxides. For further process complexity, its ability to support etchback, etch stop, planarize, and edge bead deposing, allows for increased process repeatability. The system is also maintained and serviced by AMAT / APPLIED MATERIALS customer service partner, Enviro-Tech. Enviro-Tech utilizes a combination of advanced diagnostics routine maintenance and repairs for AMAT/AMAT / APPLIED MATERIALS Producer SE systems. These services help to maintain the tool's top performance and consistent process performance. Additionally, Enviro-Tech's engineers provide training in the use of the system and developing new deposition recipes with AMAT Producer SE.
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