Used AMAT / APPLIED MATERIALS Producer SE #9281300 for sale
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ID: 9281300
Wafer Size: 12"
Vintage: 2006
CVD System, 12"
(3) Chambers
2006 vintage.
AMAT / APPLIED MATERIALS Producer SE reactor is a single-wafer gas cluster ion source reactive ion etcher (RIE) specifically designed for semiconductor fabrication. This equipment integrates the company's leading-edge plasma generation and control technologies based on hyper-field-induced unimpeded plasma flow, high ion densities, and uniform plasma energy distribution to improve processes. The low-impedance magnetically assisted ionization (MAI) technology allows for increased process flexibility and enhanced performance. The system also has excellent productivity due to the ac inductively coupled source. With its highly advanced PC-based equipment interface, AMAT Producer SE combines fully automated equipment control and multiple user capabilities. It features advanced process optimization capability that greatly reduces time and resources required for recipe set up and operational improvements. This is enabled through sophisticated software applications that control parameters such as gas flow ratios, pressure, temperature, and timing. The FEOL (Front End of Line) batch implant and etch process features make it very easy to use and can be applied to various chemical vapor deposition, ion implantation, and post-implant etch applications. APPLIED MATERIALS Producer SE is equipped with a powerful, independent loadlocked crystalline ion gun assembly that delivers high ion densities. The SE's patented close-coupled high-speed gas delivery unit delivers precise gas ratios for high-precision process control. Its unique dual mode implantation speeds up the process by allowing etching and implantation sequences to occur simultaneously. Productivity is further improved by the fast reaction time of the RIE gas pulse machine that automatically adjusts the plasma conditions for maximum efficiency. The dual and split-mode substrate handling tool of Producer SE offers unprecedented flexibility with the option to select different chamber configurations. The asset also features advanced process monitoring capabilities with ProPlasma, which provides real-time data on plasma characteristics, etch process performance, and atomic species composition. AMAT / APPLIED MATERIALS Producer SE is a reliable and proven tool that is designed to meet the needs of semiconductor manufacturers in achieving efficient, high-quality, cost-efficient production. With its advanced feature set and control capabilities, the SE provides a cost effective solution for today's complex device fabrication needs.
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