Used AMAT / APPLIED MATERIALS Producer SE #9284854 for sale
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ID: 9284854
Wafer Size: 12"
Vintage: 2007
SACVD system, 12"
Process: BPSG
(3) Twin CVD chambers
(2) Foup loader ports
Signal tower: 4 Color
MKS and ASTEX Plasma clean
AC Control rack
Generator rack
Does not include Hard Disk Drive (HDD)
Gases:
TEOS
TEB
TEPO
LDC
Power supply: 208VAC, 50/60Hz, 3 Phase
2007 vintage.
AMAT / APPLIED MATERIALS Producer SE is a revolutionary and advanced reactor designed for semiconductor device manufacturing. This stand-alone equipment consists of three components: an active Metal Organic Chemical Vapor Deposition (MOCVD) chamber, an adjacent inert by-products chamber, and a multi-gas source. The MOCVD chamber is designed to grow high-quality semiconductor films and control the thermal history of the materials via its advanced temperature control. The inert by-products chamber provides a safe containment space for hazardous vaporized materials before they are safely purged through the exhaust system. The multi-gas source provides the necessary gases needed to deposit the epitaxial material on substrates. AMAT Producer SE reactor is designed with several patented technologies that distinguish it from traditional MOCVD systems. These include an advanced temperature control unit that ensures a rapid response and optimal process temperatures; a unique quartz dome configured for greater chemical reactivity with minimum gas consumption; a triple vertical temperature zone for improved homogeneity; and an advanced exhaust machine that enables efficient purging of hazardous materials. This state of the art tool also features a range of diagnostic tools and interactive controllers that allow for precise monitoring and control. APPLIED MATERIALS Producer SE is designed to meet the most demanding requirements for semiconductor production. It boasts an unparalleled degree of accuracy and repeatability, helping to reduce errors and increase production yields. Its Design-for-Semiconductor (DFS) concept provides optimum control over temperature during the MOCVD process to ensure the highest quality films irrespective of process conditions and environmental influences. This asset is also capable of forming epitaxial structures with a precise thickness, shape, and crystalline structure. Overall, Producer SE is an advanced reactor capable of meeting the rigorous demands of semiconductor production. Its unique features ensure superior film quality, tight thermal management, speedy processing times, and low-cost operation. Additionally, the application of advanced diagnostics and controllers makes for an efficient and reliable tool for sophisticated device research and production.
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