Used AMAT / APPLIED MATERIALS Producer SE #9294355 for sale
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ID: 9294355
Wafer Size: 12"
Vintage: 2006
CVD System, 12"
Process type: PETEOS
2006 vintage.
AMAT / APPLIED MATERIALS Producer SE is a state-of-the-art epitaxial deposition equipment designed for semiconductor researchers, manufacturers, and academic users. It offers a wide range of deposition and etch processes combined with precise control and in-situ monitoring capabilities. The system is equipped with an epitaxial chemical vapor deposition (E-CVD) chamber and a dielectric etch chamber. AMAT Producer SE can deposit various III-V materials such as GaAs and InP, as well as SiO2 and Si3N4. The deposition process is supported by high-efficiency heaters allowing for minimal thermal distortion during growth for achieving higher quality epilayers. The chamber is designed to provide a uniform deposition over large areas (up to 4-inch wafer diameter). APPLIED MATERIALS Producer SE is equipped with an advanced, dedicated epi-monitor unit for in-situ characterization of layers during the deposition process. This machine includes multiple orthogonal in-situ micro-spectroscopy techniques such as Laser Induced Current Voltage (LIV or IV), Ion Channeling, Photoluminescence (PL), and Atomic Force Microscopy (AFM). This enables real-time control of the epitaxial growth process, allowing for the optimization of layer quality and uniformity across the entire substrate. In addition, the tool is equipped with a remotely controlled dielectric etch chamber with a wide range of compatible etch gases. This chamber is equipped with direct plasma source sources, providing for precise control of process gas flow, etch power, and substrate temperature. This enables precise etching of various dielectric materials, such as Oxynitride, SiO2 and Si3N4, for high aspect ratio applications. Producer SE is an easy to use and highly reliable asset, providing excellent process control and layer characterization capabilities. With its high-precision etch and deposition capabilities combined with in-situ monitoring capabilities, AMAT / APPLIED MATERIALS Producer SE is an ideal tool for researchers and manufacturers who need to produce high-quality epitaxial layers on a large scale.
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