Used AMAT / APPLIED MATERIALS Producer SE #9390853 for sale
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ID: 9390853
Wafer Size: 12"
Vintage: 2005
PECVD System, 12"
Process: APF
(2) Load ports
Does not include Hard Disk Drive (HDD)
Power supply: 208 AC, 3 Phase
2005 vintage.
AMAT / APPLIED MATERIALS Producer SE Reactor is a highly efficient reactor designed for small-scale production of single-wafer electrochemical deposition processes of metals, alloys and other materials. The equipment features a high-performance power supply for precise, repeatable process control and a reliable, durable platform to ensure uninterrupted operating time. The system includes a load-locked, ion-beam-induced deposition source, providing uniform source material distribution over the substrate. The adjustable chamber pressure allows for precise control of process parameters throughout the deposition. The high-vacuum conditions also enable the efficient use of low-cost material feedstocks, such as metal and metal halide sources. The core of the unit is a single-plate chamber that can be configured to a variety of substrate processes, including linear sweep and ramp deposition, step deposition and time-dependent processes. Versatile options allow for automated control of the entire process, from ion beam and point of deposition, to substrate temperature and potentials. The chamber also features fully adjustable substrate rotation and a choice of isolation or cooling options. The reactor is equipped with an integrated, semi-closed loop Process Control and Quality Assurance (PCQA) machine designed to ensure consistent, repeatable results. The tool features multiple sensors to monitor and control process parameters in real-time, providing advanced process monitoring capabilities. The asset can also be integrated with a real-time monitoring model to provide feedback on recessed particles, film thickness, composition, and surface defect analysis. The equipment can be scaled to accommodate a wide range of production targets, spanning from today's single-plate wafers to advanced panel substrates and beyond. This modularity allows for scalable operation that optimizes production yields, cost efficiency and an overall increase in quality assurance. The complete process is also optimized for safety with the inclusion of a gas detection system and advanced control technology to control plasma and flashover events. Additionally, an automated calibration unit gives constant feedback on process parameters to ensure the tightest process control. AMAT Producer SE Reactor is an innovative process control and deposition machine designed for a wide range of production requirements. The tool combines outstanding flexibility, high throughput and improved process consistency, making it an ideal solution for today's demanding production environments.
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