Used AMAT / APPLIED MATERIALS Producer #9111149 for sale
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ID: 9111149
CVD System, 12"
(3) Chambers
(4) Load Ports
EFM: Kawasaki Robot 30D61H-A002
TM: Brooks Mag 8, P/N: 0190-25011
AE APEX 3013, P/N: 3156114-006
MKS ASTRONex
Currently in cleanroom
2007 vintage.
A AMAT / APPLIED MATERIALS Producer, also known as a AMAT Producer, is an advanced diffusion and epitaxy reactor used in the fabrication of a range of technologies, from semiconductor devices to solar cells. APPLIED MATERIALS Producer is designed to create highly accurate and repeatable thin films, as well as reducing cycle times and ensuring process uniformity. The reactor is built with larger chambers than traditional process tools, allowing for improved throughput and multiple processes to be carried out in parallel. The reactor utilizes high-temperature, ultra-high-vacuum (UHV) technology, using a heating source such as an electron beam to deliver heat at precise temperatures and thickness in order to create the desired thin-film structure on the wafer. The wafer is first placed in an UHV chamber in a holder, then the heater coils are used to heat it to required temperature. After the wafer is heated, a low-pressure source is used to diffuse an appropriate introduction of either gas or condensed material such as arsenic or phosphorus. This gas or material acts as a dopant, which then diffuses through the deposited film to form the desired structure. This process has benefits such as faster process cycle times, improved process control, and a greater consistency in product-to-product repeatability. Producer is well suited to processes used in semiconductor fabrication, where thin-film growth and doping are required. AMAT / APPLIED MATERIALS Producer can also be used to create films with a wide range of thicknesses, as well as films with roughness and melting characteristics. This allows for a variety of devices to be manufactured, such as: transistors, diodes, transceivers and semiconductor memory chips. The greater flexibility, low-pressure technology and repeatability of AMAT Producer make it a valuable tool for the research and development of new technologies. Its capabilities and technological advances can be used for a variety of fab functions and processes, making APPLIED MATERIALS Producer an indispensable element of fabrication technology.
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