Used AMAT / APPLIED MATERIALS Producer #9204130 for sale

AMAT / APPLIED MATERIALS Producer is a high-performance, large-scale reactor designed for tungsten chemical vapor deposition (CVD) and pre- and post-processing of tungsten layers used in semiconductor device fabrication. This reactor is designed to deliver vertically uniform, defect-free layers of tungsten onto a variety of substrates. The Materials AMAT Producer is engineered with a large susceptor diameter, allowing uniform deposition of 720 mm and elimination of non-uniformity. This reactor also features uniform susceptor temperature control, allowing independent temperatures that can be set on either side of the wafer. APPLIED MATERIALS Producer is also designed with a light beam monitor which provides real-time monitoring of the deposition process. In terms of its ability to process multiple types of materials, the Materials Producer is capable of CVD deposition, etching, and cleaning via reactions developed with a variety of reagent gases. AMAT / APPLIED MATERIALS Producer has been designed to support tungsten-based strategies and processes, providing the capability to process a variety of tungsten substrates, such as copper, copper tungsten, molybdenum, and silicon dioxide. AMAT Producer is a multi-chamber configuration reactor, featuring two chambers: the process chamber and the gas source chamber. The process chamber includes a low-pressure range RF power source, reaction chamber, two independent susceptors, one-chamber type load unit, and a vacuum chamber. The gas source chamber consists of ports to control gas pressure and flow rate, a spool-piece, a dryer, and a controller to adjust power and reaction conditions. APPLIED MATERIALS Producer also comes with powerful software to provide real-time process conditions, as well as advanced diagnostics, data logging, and analysis tools. This reactor is rounded off by a number of safety features that promote safer operation, including suspended fume hoods, on-site personnel monitoring, and a 32-point safety-shutdown system. In summary, Producer is an advanced and powerful reactor designed for tungsten CVD and pre- and post-processing of layers. This reactor provides precise control of reaction conditions, supports multiple materials, and contains an array of safety features to ensure safer operation.