Used AMAT / APPLIED MATERIALS PVD Chamber for Endura #293767111 for sale
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ID: 293767111
The PVD Chamber for the Endura platform by AMAT is a physical vapor deposition (PVD) reactor designed to enable advanced semiconductor device manufacturing capabilities. This system provides a high degree of flexibility with respect to process capabilities, chamber configuration and overall system design. The PVD Chamber for the Endura platform can be used for a wide range of deposition processes, including TiN/W, tungsten carbide, and aluminum oxide, as well as other more exotic materials such as high temperature metals and alloys. Its cylindrical design makes it highly efficient and helps maintain a high degree of uniformity across the entirety of the chamber. The standard PVD Chamber for the Endura platform comes with a number of features that make the process more reliable and efficient. A high-speed electrostatic chuck delivers repeatable and uniform deposition on the substrate. Dual-frequency RF generators further increase the speed of the process and reduce electrical power consumption. An in-situ quartz viewport allows real-time monitoring of the entire deposition process, thus providing valuable insight into the quality of the resulting layer. A temperature-controlled vacuum chamber helps ensure that operating temperature remains consistent over the entire process. The PVD chamber features multiple levels of automation and control, allowing users to easily monitor and adjust the deposition parameters during transition from one process to another. Advanced software is included to ensure accurate control of all parameters for each individual layer and for complete coating batches. Automated process recipe creation is also possible so that users can quickly start a new deposition without the need for manual input. The chamber can also be fitted with a number of optional accessories to further improve its performance. A quartz liner, angled deposition substrate holder, RF shield and motion compensation device can all be added to the PVD chamber. These accessories help to reduce the cost of ownership, minimize the introduction of contamination, and improve the consistency of the deposition layers. Overall, the PVD Chamber for the Endura platform is an extremely reliable, efficient and cost-effective PVD reactor. Its flexible design and robust automation software make it suitable for a range of different applications and materials. With the addition of various accessories, this reaction chamber can enhance product yield and overall system performance.
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