Used AMAT / APPLIED MATERIALS Smartweb SL-3L/800 #293745938 for sale
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ID: 293745938
Vintage: 2018
Roll to roll coating system
(2) Chillers
Roughing pump system
Process and rewinding module
Media supply
Electrical cabinet
Cooling
Heating
Trolley
Cathode colling
Control PC
Console table
Scrubber
Coatings:
Materials / Mode
Metals: Copper, Gold, Silver, Aluminium, Molybdenum, Titanium / DC
Alloys: Ni/Cr 80/20 / DC
Dielectrics: ITO, AI:ZnO / DC
SiOx, AI2O3, TiO2 /MF
ZnO / DC, MF
System cooling water:
Inlet pressure: 4 to 6 bar
Outlet pressure: Pressure-less, Open drain
Consumption: Maximum 50 m³/h
Average consumption: Approximate 26 m³/h
Temperature (Inlet): Minimum 18°C, Maximum 22°C
Temperature rise: Maximum 6°C
Carbonate hardness: <6 to 8°
pH value: 8.5 to 10
particle size: Maximum 100 μm
Particle concentration: Maximum 10 parts/cm³
CO2-content: Maximum 15 mg/l
CI-content: Maximum 20 mg/l
Cathode cooling circuit:
Filling quantity: Approximate 1100 Liters
Carbonate hardness: <7°
pH value: 8.0 to 9
Particle size: <5 µm
Solved oxygen: Maximum 5 mg/l
Resistivity at + 25°C: >2 x 103 Ohm cm
Compressed air:
Pressure: 6 to 7 bar
Average consumption: Approximate 1 m³/h
Particle size: Maximum 5 µm
Particle concentration: Maximum 5 mg/m³
Oil-content: Maximum 5 mg/m³
Dew point: 2°C
Gases: Argon, Nitrogen, Oxygen, Argon/Oxygen 80/20
Pressure: 1, 2 bar
Purity: 99.995
Gas tubing: Stainless steel, Coupling
Winding:
Web speed: 0.5 to 20.0 m/min + 0.1% of nominal speed at the motor shaft
Unwind / Rewind: 60 to 600 N
Tension measuring rollers with analog load cell
Vacuum:
Ultimate pressure: <8 x 10^-7 mbar in sputtering compartments of process modules
Pump down time to ultimate pressure: 24 Hours
Pressure during sputtering: 1 to 9 x 10^-3 mbar
Pump down time to 6 x 10^-6 mbar: <60 minutes
Measured at a pressure: < 2x10^-3 mbar
Gas separation factor between sputter compartments and sputtering compartments:
>100: 1, only for maximum substrate thickness loaded
Electrical Services:
Voltage: 400 V +10/-10% 50 Hz, 3 Phase, TN-network with loadable PEN for 60 Hz
Connected load: 320 kVA
Average consumption: Approximate 240 kW
Short circuit current: Maximum 50 kA
Process coating:
Magnetron sputtering coating technology
One coated side
Substrate width: Maximum 820 mm
Coating area web width reduced: 10 mm
Coating width: Minimum: 300 mm, Maximum: 600 mm
Environment:
Temperature: Minimum 15°C, Maximum 35°C
Humidity: Maximum 90% at 20°C, Maximum 50% at 35°C
Maximum altitude of installation site: 1000 m above sea level
2018 vintage.
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