Used AMAT / APPLIED MATERIALS Spare parts for P5000 #293698074 for sale
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ID: 293698074
Description / Part number
Turbo interconnect board / 0100-20051 Rev B1
TEOS gas interface board / 0100-09107 Rev E
Liquid injector interface board / 0100-09210 Rev D
Expanded gas panel board / 0100-09106 Rev F
Gas panel board / 0100-09153 Rev E
Liquid injection remote controller / 0010-09886 Rev D
5000 Platform system electronic / 0010-09001 Rev AB
5000 Platform VME / 0010-70379 Rev B
Seriplex controller assembly - chamber A / 0100-35124 (IO Dist. BD) + 0190-35773 (Seriplex)
Seriplex controller assembly - chamber D / 0100-35124 (IO Dist. BD) + 0190-35776 (Seriplex)
(5) Lamps / 0010-09978 Rev A
(3) Lamp housings / 0015-09091.
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